scholarly journals Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering

2002 ◽  
Vol 25 (3) ◽  
pp. 227-230 ◽  
Author(s):  
M. K. Jayaraj ◽  
Aldrin Antony ◽  
Manoj Ramachandran
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Transparent Conducting

Fabrication of Amorphous Indium Gallium Zinc Oxide Thin Film Transistor at Low Temperature by RF Magnetron Sputtering

2012 ◽  
Vol 33 (10) ◽  
pp. 1149-1152 ◽  
Author(s):  
信恩龙 XIN En-long ◽  
李喜峰 LI Xi-feng ◽  
陈龙龙 CHEN Long-long ◽  
石继锋 SHI Ji-feng ◽  
李春亚 LI Chun-ya ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Thin Film Transistor ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Film ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Thin Film ◽  
Indium Gallium
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