Low temperature growth of AIGaP and GaP on si substrates by atomic layer epitaxy

1992 ◽  
Vol 21 (10) ◽  
pp. 965-970 ◽  
Author(s):  
J. R. Gong ◽  
S. Nakamura ◽  
M. Leonard ◽  
S. M. Bedair ◽  
N. A. El-Masry
Keyword(s):  
Low Temperature ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Si Substrates

Atomic Layer Epitaxy of GaAs on Ge Substrates

1989 ◽  
Vol 163 ◽  
Author(s):  
J. Ramdani ◽  
B.T. Mcdermott ◽  
S.M. Bedair
Keyword(s):  
Low Temperature ◽  
Growth Temperature ◽  
Adsorption Process ◽  
Substantial Reduction ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Low Temperature Deposition ◽  
Temperature Deposition

AbstractWe report on the low temperature growth of GaAs on Ge substrates using Atomic Layer Epitaxy. Low temperature deposition has resulted in substantial reduction of the outdiffusion of Ge into the GaAs epilayer as being indicated from SIMS. The I-V characteristics of the GaAs/Ge heterojunction were thyristor like or near abrupt depending on the growth temperature. We also report on the use of the Atomic Layer Epitaxy self-limiting adsorption process of TMGa to control the diffusion of Ga into Ge substrates at the monolayer level.

scholarly journals Extra-Low Temperature Growth of ZnO by Atomic Layer Deposition with Diethylzinc Precursor

2007 ◽  
Vol 112 (2) ◽  
pp. 401-406 ◽  
Author(s):  
I.A. Kowalik ◽  
E. Guziewicz ◽  
K. Kopalko ◽  
S. Yatsunenko ◽  
M. Godlewski ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

scholarly journals Low-temperature growth of AlN thin films by plasma-enhanced atomic layer deposition

2013 ◽  
Vol 62 (11) ◽  
pp. 117302
Author(s):  
Feng Jia-Heng ◽  
Tang Li-Dan ◽  
Liu Bang-Wu ◽  
Xia Yang ◽  
Wang Bing
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Extra-Low Temperature Growth of ZnO Thin Films by Atomic Layer Deposition

2008 ◽  
Vol 53 (9(5)) ◽  
pp. 2880-2883 ◽  
Author(s):  
E. Guziewicz ◽  
M. Godlewski ◽  
K. Kopalko ◽  
I. A. Kowalik ◽  
S. Yatsunenko ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition
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