An accurate and computationally efficient semi-empirical model for arsenic implants into single-crystal (100) silicon
1994 ◽
Vol 23
(8)
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pp. 801-808
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2021 ◽
Vol 212
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pp. 104606
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2012 ◽
Vol 13
(2)
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pp. 3-12
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Keyword(s):
2016 ◽
Vol 106
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pp. 992-1001
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