Low temperature cleaning of Si by a H2/AsH3 plasma prior to heteroepitaxial growth of GaAs by metalorganic chemical vapor deposition (MOCVD)

Euijoon Yoon; Patrice Parris; Rafael Reif

doi:10.1007/bf02651294

Low temperature cleaning of Si by a H2/AsH3 plasma prior to heteroepitaxial growth of GaAs by metalorganic chemical vapor deposition (MOCVD)

Journal of Electronic Materials ◽

10.1007/bf02651294 ◽

1990 ◽

Vol 19 (4) ◽

pp. 337-343 ◽

Cited By ~ 3

Author(s):

Euijoon Yoon ◽

Patrice Parris ◽

Rafael Reif

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Heteroepitaxial Growth ◽

Metalorganic Chemical

Download Full-text

Low‐temperature heteroepitaxial growth of InSb on CdTe by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.99829 ◽

1988 ◽

Vol 53 (9) ◽

pp. 773-775 ◽

Cited By ~ 10

Author(s):

J. C. Chen ◽

P. Bush ◽

W. K. Chen ◽

Pao‐Lo Liu

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Heteroepitaxial Growth ◽

Metalorganic Chemical

Download Full-text

Structural and electrical properties of BaTiO3thin films grown onp‐InSb substrate by metalorganic chemical vapor deposition at low temperature

Applied Physics Letters ◽

10.1063/1.109550 ◽

1993 ◽

Vol 62 (15) ◽

pp. 1788-1790 ◽

Cited By ~ 16

Author(s):

T. W. Kim ◽

M. Jung ◽

H. J. Kim ◽

Y. S. Yoon ◽

W. N. Kang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Structural And Electrical Properties ◽

Metalorganic Chemical

Download Full-text

High speed metal‐semiconductor‐metal photodetector manufactured on GaAs by low‐temperature photoassisted metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.114129 ◽

1995 ◽

Vol 66 (26) ◽

pp. 3651-3653 ◽

Cited By ~ 3

Author(s):

K. S. Boutros ◽

J. C. Roberts ◽

S. M. Bedair ◽

T. F. Carruthers ◽

M. Y. Frankel

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

High Speed ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metal Semiconductor Metal ◽

Metalorganic Chemical

Download Full-text

Low Temperature Fabrication Of YBa2Cu3O7−x High-Tc Superconducting Thin Films By Plasma-Enhanced Metalorganic Chemical Vapor Deposition

Science and Technology of Thin Film Superconductors 2 ◽

10.1007/978-1-4684-1345-8_32 ◽

1990 ◽

pp. 217-222

Author(s):

J. Zhao ◽

D. W. Noh ◽

C. S. Chern ◽

Y. Q. Li ◽

P. Norris ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Films ◽

High Tc ◽

Metalorganic Chemical

Download Full-text

Hydrogen beam stimulated low‐temperature dissociation of organometallics—application for lowering the growth temperature in a metalorganic chemical vapor deposition process

Applied Physics Letters ◽

10.1063/1.103004 ◽

1990 ◽

Vol 56 (20) ◽

pp. 2019-2021 ◽

Cited By ~ 4

Author(s):

G. V. Jagannathan ◽

Merrill L. Andrews ◽

Alec T. Habig

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Growth Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Hydrogen Beam ◽

Metalorganic Chemical

Download Full-text

Low‐temperature luminescent properties of degeneratep‐type GaAs grown by low‐pressure metalorganic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.356283 ◽

1994 ◽

Vol 75 (4) ◽

pp. 2210-2214 ◽

Cited By ~ 13

Author(s):

H. D. Chen ◽

M. S. Feng ◽

P. A. Chen ◽

K. C. Lin ◽

C. C. Wu

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Luminescent Properties ◽

Low Pressure ◽

Metalorganic Chemical

Download Full-text

Structure of high resistivity GaAs film grown by low‐temperature metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.118022 ◽

1996 ◽

Vol 69 (21) ◽

pp. 3239-3241

Author(s):

Wen‐Chung Chen ◽

C.‐S. Chang ◽

S. H. Chan

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

High Resistivity ◽

Gaas Film ◽

Metalorganic Chemical

Download Full-text

Preparation and characterization of thin films of copper(II) oxide by low temperature normal pressure metalorganic chemical vapor deposition

Materials Research Bulletin ◽

10.1016/0025-5408(89)90128-1 ◽

1989 ◽

Vol 24 (2) ◽

pp. 213-219 ◽

Cited By ~ 15

Author(s):

Angus B. Laurie ◽

Michael L. Norton

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Normal Pressure ◽

Metalorganic Chemical

Download Full-text

Low temperature deposition of Ba1-xSrxTiO3 thin films by ECR plasma-enhanced metalorganic chemical vapor deposition

Integrated Ferroelectrics ◽

10.1080/10584589808202076 ◽

1998 ◽

Vol 21 (1-4) ◽

pp. 355-366 ◽

Cited By ~ 3

Author(s):

S. R. Gilbert ◽

S. R. Summerfelt ◽

T. S. Moise ◽

J. M. Anthony

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Ecr Plasma ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Metalorganic Chemical

Download Full-text

Low Temperature Direct Crystallization of SrBi2(Ta1-xNbx)2O9Thin Films by Thermal Metalorganic Chemical Vapor Deposition and Their Properties

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.3337 ◽

2001 ◽

Vol 40 (Part 1, No. 5A) ◽

pp. 3337-3342 ◽

Cited By ~ 8

Author(s):

Masatoshi Mitsuya ◽

Norimasa Nukaga ◽

Keisuke Saito ◽

Minoru Osada ◽

Hiroshi Funakubo

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Direct Crystallization ◽

Metalorganic Chemical

Download Full-text