Light-emitting nanocrystalline silicon by low-pressure chemical-vapor deposition of disilane

1996 ◽  
Vol 18 (10) ◽  
pp. 1159-1165
Author(s):  
C. Manfredotti ◽  
F. Fizzotti ◽  
G. Amato
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Nanocrystalline Silicon ◽  
Low Pressure ◽  
Light Emitting ◽  
Pressure Chemical

Intense whole area electroluminescence from low pressure chemical vapor deposition-silicon-rich oxide based light emitting capacitors

2010 ◽  
Vol 108 (4) ◽  
pp. 043105 ◽  
Author(s):  
A. A. González Fernández ◽  
M. Aceves Mijares ◽  
A. Morales Sánchez ◽  
K. M. Leyva
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Light Emitting ◽  
Pressure Chemical

scholarly journals Raman study of light-emitting SiNx films grown on Si by low-pressure chemical vapor deposition

2015 ◽  
Vol 579 ◽  
pp. 110-115 ◽  
Author(s):  
F. Komarov ◽  
L. Vlasukova ◽  
I. Parkhomenko ◽  
O. Milchanin ◽  
A. Mudryi ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Light Emitting ◽  
Pressure Chemical ◽  
Raman Study

In Situ Phosphorus-Doped Poly-Si by Low Pressure Chemical Vapor Deposition for Passivating Contacts

2020 ◽  
Author(s):  
Meric Firat ◽  
Hariharsudan Sivaramakrishnan Radhakrishnan ◽  
Maria Recaman Payo ◽  
Filip Duerinckx ◽  
Rajiv Sharma ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Pressure Chemical ◽  
Phosphorus Doped

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection
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