Deformation of alluvial river beds composed of nonuniform material

1973 ◽  
Vol 7 (9) ◽  
pp. 890-893
Author(s):  
N. A. Rzhanitsyn ◽  
Yu. A. Ibad-Zade
Keyword(s):  
Alluvial River ◽  
Nonuniform Material

Modeling and Analyzing on Nonuniformity of Material Removal in Chemical Mechanical Polishing of Silicon Wafer

2004 ◽  
Vol 471-472 ◽  
pp. 26-31 ◽  
Author(s):  
Jian Xiu Su ◽  
Dong Ming Guo ◽  
Ren Ke Kang ◽  
Zhu Ji Jin ◽  
X.J. Li ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Chemical Mechanical Polishing ◽  
Material Removal ◽  
Mechanical Polishing ◽  
Wafer Surface ◽  
Removal Mechanism ◽  
Particle Movement ◽  
Material Removal Mechanism ◽  
The Relationship ◽  
Nonuniform Material

Chemical mechanical polishing (CMP) has already become a mainstream technology in global planarization of wafer, but the mechanism of nonuniform material removal has not been revealed. In this paper, the calculation of particle movement tracks on wafer surface was conducted by the motion relationship between the wafer and the polishing pad on a large-sized single head CMP machine. Based on the distribution of particle tracks on wafer surface, the model for the within-wafer-nonuniformity (WIWNU) of material removal was put forward. By the calculation and analysis, the relationship between the motion variables of the CMP machine and the WIWNU of material removal on wafer surface had been derived. This model can be used not only for predicting the WIWNU, but also for providing theoretical guide to the design of CMP equipment, selecting the motion variables of CMP and further understanding the material removal mechanism in wafer CMP.

Multi-way modeling of hydro-chemical data of an alluvial river system—A case study

2006 ◽  
Vol 571 (2) ◽  
pp. 248-259 ◽  
Author(s):  
Kunwar P. Singh ◽  
Amrita Malik ◽  
Vinod K. Singh ◽  
Nikita Basant ◽  
Sarita Sinha
Keyword(s):  
River System ◽  
Chemical Data ◽  
Alluvial River ◽  
System A

scholarly journals The graded alluvial river: Profile concavity and downstream fining

2016 ◽  
Vol 43 (12) ◽  
pp. 6285-6293 ◽  
Author(s):  
Astrid Blom ◽  
Enrica Viparelli ◽  
Víctor Chavarrías
Keyword(s):  
Alluvial River ◽  
Downstream Fining
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