Surface reconstruction from stereoscopy and “shape from shading” in SEM images

1991 ◽  
Vol 4 (4) ◽  
pp. 271-285 ◽  
Author(s):  
W. Beil ◽  
I. C. Carlsen
2005 ◽  
Vol 37 (11) ◽  
pp. 927-938 ◽  
Author(s):  
Adam Seeger ◽  
Horst Haussecker

2014 ◽  
Vol 8 (1) ◽  
pp. 1-15 ◽  
Author(s):  
Aly S. Abdelrahim ◽  
Aly A. Farag ◽  
Shireen Y. Elhabian ◽  
Moumen T. El‐Melegy

Author(s):  
T. Kamino ◽  
T. Yaguchi ◽  
M. Tomita ◽  
H. Saka

Metal deposition is one of the most effective methods to reconstruct the surface structure of Si, and a number of studies using electron microscopes have been carried out. Endo et al. have studied Au-deposited Si(111) surface by ultra-high vacuum(UHV) scanning electron microscope(SEM), and obtained SEM images of 7 × 7 and 5 × 2-Au structure at 600°C. Ozawa et al. have observed Audeposited Si(111) surface by UHV-transmission electron microscope(TEM) and observed the formation of 5 × 2-Au structure at 700°C. Marks et al. have studied the structure of Au-deposited Si(lll) surface to reconstruct electronic potential on the surface.Recently, we developed a direct heating type- specimen heating holder consists of two heating elements, for use with a conventional analytical TEM, and applied to an in-situ study of the surface reconstruction of Au-deposited Si at high temperature. A schematic drawing of the heating holder is shown in Fig. 1. Tungsten wire with a diameter of 25εm was used as the heating elements. The upper heating element was used for metal deposition, in this case Au, and lower one for the heating of substrate material, in this case Si. The microscope used in the study is a H-9000NAR analytical TEM operated at 300kV. The spherical and chromatic aberration coefficients of the objective lens were 0.69 and 1.4mm, respectively, and the TEM image resolution was 0.175nm


2015 ◽  
Vol 87 (3) ◽  
pp. 283-292 ◽  
Author(s):  
Simonas Kareiva ◽  
Algirdas Selskis ◽  
Feliksas Ivanauskas ◽  
Simas Sakirzanovas

Abstract Three-dimensional reconstruction technique to fully characterize structural performance of solid materials is suggested. The three-dimensional sample data out of the SEM images taken from different angles were extrapolated, measured and interpreted. In stereometry, the technique of three dimensional SEM imaging is fairly straightforward. Selected specimen area is photographed using SEM imaging tools from two different angles. Tilting is performed using standard SEM manipulation tools. In some cases, the specimen must be rotated to such a position, in which the tilting is done on visual ordinate axis. The resulting images are combined in pairs using any three-dimensional anaglyph software available to produce an anaglyph image, which, in turn, can be analyzed using standard 3D glasses. To achieve finer results, extrapolation of spatial data was done from three or more sample images using visual reconstruction software applications. This technique for recovering spatial data from the SEM pictures (structure-from-motion) is the VisualSFM software, which is an application for spatial reconstruction using structure from sample motion. Using VisualSFM, the images are analyzed for matching points and the camera angle is guessed for each image. Any number of additional viewports can be added to VisualSFM software. Based on this input, a surface is reconstructed where the matching points intersect and a colour value is assigned. The software produces a cloud of points, which has to be processed externally. Freely available software, such as MeshLab can be used to join the point cloud to a mesh and, as a second step of reconstruction, apply surface properties to the mesh polygons. The gold particles were selected as model material for the spatial 3D surface reconstruction.


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