Cross-sectional characterization of integrated circuit structures by scanning electron microscopy

1987 ◽  
Vol 6 (6) ◽  
pp. 633-634
Author(s):  
A. Vijay Kumar ◽  
G. H. Sarma ◽  
A. Prabhakar
2001 ◽  
Vol 707 ◽  
Author(s):  
Ian C. Bache ◽  
Catherine M. Ramsdale ◽  
D. Steve Thomas ◽  
Ana-Claudia Arias ◽  
J. Devin MacKenzie ◽  
...  

ABSTRACTCharacterising the morphology of thin films for use in device applications requires the ability to study both the structure within the plane of the film, and also through its thickness. Environmental scanning electron microscopy has proved to be a fruitful technique for the study of such films both because contrast can be seen within the film without the need for staining (as is conventionally done for electron microscopy), and because cross-sectional images can be obtained without charging artefacts. The application of ESEM to a particular blend of relevance to photovoltaics is described.


2001 ◽  
Vol 710 ◽  
Author(s):  
Ian C. Bache ◽  
Catherine M. Ramsdale ◽  
D. Steve Thomas ◽  
Ana-Claudia Arias ◽  
J. Devin MacKenzie ◽  
...  

ABSTRACTCharacterising the morphology of thin films for use in device applications requires the ability to study both the structure within the plane of the film, and also through its thickness. Environmental scanning electron microscopy has proved to be a fruitful technique for the study of such films both because contrast can be seen within the film without the need for staining (as is conventionally done for electron microscopy), and because cross-sectional images can be obtained without charging artefacts. The application of ESEM to a particular blend of relevance to photovoltaics is described.


2018 ◽  
Vol 3 (1) ◽  
pp. 12 ◽  
Author(s):  
Zaimahwati Zaimahwati ◽  
Yuniati Yuniati ◽  
Ramzi Jalal ◽  
Syahman Zhafiri ◽  
Yuli Yetri

<p>Pada penelitian ini telah dilakukan isolasi dan karakterisasi bentonit alam menjadi nanopartikel montmorillonit. Bentonit alam yang digunakan diambil dari desa Blangdalam, Kecamatan Nisam Kabupaten Aceh Utara.  Proses isolasi meliputi proses pelarutan dengan aquades, ultrasonic dan proses sedimentasi. Untuk mengetahui karakterisasi montmorillonit dilakukan uji FT-IR, X-RD dan uji morfologi permukaan dengan Scanning Electron Microscopy (SEM). Partikel size analyzer untuk menganalisis dan menentukan ukuran nanopartikel dari isolasi bentonit alam. Dari hasil penelitian didapat ukuran nanopartikel montmorillonit hasil isolasi dari bentonit alam diperoleh berdiameter rata-rata 82,15 nm.</p><p><em>In this research we have isolated and characterized natural bentonite into montmorillonite nanoparticles. Natural bentonite used was taken from Blangdalam village, Nisam sub-district, North Aceh district. The isolation process includes dissolving process with aquades, ultrasonic and sedimentation processes.  The characterization of montmorillonite, FT-IR, X-RD and surface morphology test by Scanning Electron Microscopy (SEM). Particle size analyzer to analyze and determine the size of nanoparticles from natural bentonite insulation. From the research results obtained the size of montmorillonite nanoparticles isolated from natural bentonite obtained an average diameter of 82.15 nm.</em></p>


Nanomaterials ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 446
Author(s):  
Ioannis Spanos ◽  
Zacharias Vangelatos ◽  
Costas Grigoropoulos ◽  
Maria Farsari

The need for control of the elastic properties of architected materials has been accentuated due to the advances in modelling and characterization. Among the plethora of unconventional mechanical responses, controlled anisotropy and auxeticity have been promulgated as a new avenue in bioengineering applications. This paper aims to delineate the mechanical performance of characteristic auxetic and anisotropic designs fabricated by multiphoton lithography. Through finite element analysis the distinct responses of representative topologies are conveyed. In addition, nanoindentation experiments observed in-situ through scanning electron microscopy enable the validation of the modeling and the observation of the anisotropic or auxetic phenomena. Our results herald how these categories of architected materials can be investigated at the microscale.


2019 ◽  
Vol 7 (1) ◽  
Author(s):  
Liu Liu ◽  
Decai Gong ◽  
Zhengquan Yao ◽  
Liangjie Xu ◽  
Zhanyun Zhu ◽  
...  

Abstract Historically, sutras played an important role in spreading Buddhist faith and doctrine, and today these remain important records of Buddhist thought and culture. A Mahamayuri Vidyarajni Sutra with polychrome paintings was found inside the cavity on top of the Nanmen Buddhist pagoda, built in the early Tang dynasty (618–627 CE) and located in Anhui Province, China. Textile was found on the preface which is strongly degraded and fragile. Unfortunately, the whole sutra is under severe degradation and is incomplete. Technical analysis based on scientific methods will benefits the conservation of the sutra. Optical microscopy (OM), micro-Raman spectroscopy combined with optical microscope (Raman), scanning electron microscopy in combination with energy dispersive X-ray analysis (SEM–EDS) and Fourier Transform Infrared Spectroscopy (FTIR) were used to characterize the pigment and gilded material, as well as the paper fiber and textile. Pigments such as cinnabar, minium, paratacamite, azurite, lead white were found. Gilded material was identified as gold. A five-heddle warp satin, made of silk, was found as the textile on the preface of the sutra. The sutra’s preface and inner pages were made of paper comprised of bamboo and bark. As a magnificent yet recondite treasure of Buddhism, the sutra was analyzed for a better understanding of the material. A conservation project of the sutra will be scheduled accordingly.


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