A self-consistent one-dimensional model for He nonequilibrium kinetics in RF discharges
1993 ◽
Vol 13
(3)
◽
pp. 499-519
◽
Keyword(s):
2000 ◽
Vol 33
(5)
◽
pp. 517-523
◽
Keyword(s):
1977 ◽
Vol 58
(3)
◽
pp. 767-776
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 22
(2)
◽
pp. 177-196
Keyword(s):
2021 ◽
pp. 126115
Keyword(s):
1992 ◽
Vol 25
(10)
◽
pp. 2889-2896
◽