Rate constants for the etching of gallium arsenide by atomic chlorine

1991 ◽  
Vol 11 (2) ◽  
pp. 311-321 ◽  
Author(s):  
Jae H. Hat ◽  
Elmer A. Ogryzlo
Keyword(s):  
Gallium Arsenide ◽  
Rate Constants ◽  
Atomic Chlorine

Rate constants for the reaction of atomic chlorine with methanol and dimethyl ether from 200 to 500 K

1979 ◽  
Vol 70 (8) ◽  
pp. 3652-3656 ◽  
Author(s):  
J. V. Michaela) ◽  
D. F. Nava ◽  
W. A. Payne ◽  
L. J. Stiefb)
Keyword(s):  
Dimethyl Ether ◽  
Rate Constants ◽  
Atomic Chlorine

Rate constants for the reactions of atomic chlorine with Group 4 and Group 5 hydrides

1978 ◽  
Vol 82 (25) ◽  
pp. 2633-2637 ◽  
Author(s):  
D. J. Schlyer ◽  
A. P. Wolf ◽  
P. P. Gaspar
Keyword(s):  
Rate Constants ◽  
Group 4 ◽  
Group 5 ◽  
Atomic Chlorine

Rate constants for the reaction of atomic chlorine with dimethyl peroxide from 220 to 330 K

1981 ◽  
Vol 77 (1) ◽  
pp. 110-114 ◽  
Author(s):  
J.V. Michael ◽  
D.F. Nava ◽  
W.A Payne ◽  
L.J. Stief
Keyword(s):  
Rate Constants ◽  
Atomic Chlorine
Sign in / Sign up

Export Citation Format

Share Document