In this third and final installment on x-ray analysis in the environmental and low vacuum SEM, I will present experimental methods for measuring beam scatter. In my previous two articles I discussed how operating conditions detemine beam scatter. It was shown that the type of gas used, the gas pressure in the chamber, the working distance or beam gas path length, and the accelerating voltage all have an effect on how much the electron beam scatters. I also discussed how the beam scatter influences x-ray results by producing x-rays beyond the area of the primary beam. Furthermore, I showed how software models could be used to determine the amount of beam scatter based on different combinations of the four variables (pressure, gas, working distance, and kV).
X-ray Analysis in the Low Vacuum SEM (Part 3 of 3)