Influence of crystallization temperature on growth rate of epitaxial gallium arsenide layers in the system GaAs-AsCl3-H2
Keyword(s):
1988 ◽
Vol 53
(12)
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pp. 2995-3013
Keyword(s):
1999 ◽
Vol 14
(9)
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pp. 3653-3662
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Keyword(s):
2020 ◽
Vol 29
(1)
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pp. 19-22