Autocorrelation-function method of measuring film thicknesses
2004 ◽
Vol 19
(5)
◽
pp. 324-337
◽
Keyword(s):
1986 ◽
Vol 133
(1)
◽
pp. 95
◽
Keyword(s):
Keyword(s):
1993 ◽
Vol 32
(8)
◽
pp. 1433-1440
◽
1986 ◽
Vol 133
(2)
◽
pp. 214
1993 ◽
Vol 51
◽
pp. 224-225