Computer simulation of the impurity distribution over the thickness of a film during growth out of the gas phase
1988 ◽
Vol 65
(6)
◽
pp. 2513-2517
◽
Keyword(s):
1980 ◽
Vol 19
(5)
◽
pp. 333-343
◽
2012 ◽
Vol 116
(20)
◽
pp. 5872-5881
◽
1968 ◽
Vol 26
◽
pp. 292-293
Keyword(s):
1996 ◽
Vol 54
◽
pp. 154-155
Keyword(s):