Ultratrace analysis of volatile organic compounds in semiconductor industry

W. Holzapfel; K. Budde

doi:10.1007/bf00633563

Ultratrace analysis of volatile organic compounds in semiconductor industry

Fresenius Journal of Analytical Chemistry ◽

10.1007/bf00633563 ◽

1992 ◽

Vol 343 (9-10) ◽

pp. 769-770 ◽

Cited By ~ 4

Author(s):

W. Holzapfel ◽

K. Budde

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Semiconductor Industry ◽

Ultratrace Analysis ◽

Volatile Organic

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A Resource utilization method for volatile organic compounds emission from the semiconductor industry: Selective catalytic oxidation of isopropanol to acetone Over Au/α-Fe2O3 nanosheets

Applied Catalysis B Environmental ◽

10.1016/j.apcatb.2020.119011 ◽

2020 ◽

Vol 275 ◽

pp. 119011 ◽

Cited By ~ 5

Author(s):

Honghong Zhang ◽

Lingyun Dai ◽

Yuan Feng ◽

Yuhan Xu ◽

Yuxi Liu ◽

...

Keyword(s):

Volatile Organic Compounds ◽

Catalytic Oxidation ◽

Organic Compounds ◽

Resource Utilization ◽

Semiconductor Industry ◽

Selective Catalytic Oxidation ◽

Volatile Organic

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Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

IEEE Transactions on Industry Applications ◽

10.1109/28.720435 ◽

1998 ◽

Vol 34 (5) ◽

pp. 953-966 ◽

Cited By ~ 113

Author(s):

H. Kohno ◽

A.A. Berezin ◽

Jen-Shih Chang ◽

M. Tamura ◽

T. Yamamoto ◽

...

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Capillary Tube ◽

Semiconductor Industry ◽

Volatile Organic

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Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

IAS '95. Conference Record of the 1995 IEEE Industry Applications Conference Thirtieth IAS Annual Meeting ◽

10.1109/ias.1995.530472 ◽

2002 ◽

Cited By ~ 1

Author(s):

H. Kohno ◽

M. Tamura ◽

A. Shibuya ◽

S. Honda ◽

A.A. Berezin ◽

...

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Capillary Tube ◽

Semiconductor Industry ◽

Volatile Organic

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Biological treatment of volatile organic compounds (VOCs)-containing wastewaters from wet scrubbers in semiconductor industry

Chemosphere ◽

10.1016/j.chemosphere.2021.131137 ◽

2021 ◽

pp. 131137

Author(s):

Hai-Hsuan Cheng ◽

I-Chun Lu ◽

Po-Wei Huang ◽

Yi-Ju Wu ◽

Liang-Ming Whang

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Biological Treatment ◽

Semiconductor Industry ◽

Volatile Organic ◽

Wet Scrubbers

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Issues in Environmental Science and Technology, Volume 4: Volatile Organic Compounds in the Atmosphere Edited by R. E. Hester (University of York) and R. M. Harrison (University of Birmingham). The Royal Society of Chemistry: Cambridge. 1995. xi + 140 pp. $27.00. ISBN 0-85404-215-6.

Journal of the American Chemical Society ◽

10.1021/ja965571z ◽

1996 ◽

Vol 118 (36) ◽

pp. 8774-8774

Author(s):

Robert M. Hammaker

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Royal Society ◽

Environmental Science ◽

Science And Technology ◽

Volatile Organic

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Plant-produced volatile organic compounds

AccessScience ◽

10.1036/1097-8542.yb133331 ◽

2015 ◽

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Volatile Organic

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232. Volatile Organic Compounds Generated From Artificial Butter Flavors in Microwave Popcorn Production

10.3320/1.2758004 ◽

2003 ◽

Author(s):

R. Boylstein ◽

C. Piacitelli ◽

G. Kullman ◽

A. Grote

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Volatile Organic

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10. The Study of Applicability of Activated Carbon Fiber (ACF) in Passive Mode for Removal of Volatile Organic Compounds (Vocs) in Indoor Environments

10.3320/1.2758316 ◽

2004 ◽

Author(s):

H. Lu ◽

N. Zimmerman

Keyword(s):

Activated Carbon ◽

Carbon Fiber ◽

Volatile Organic Compounds ◽

Organic Compounds ◽

Activated Carbon Fiber ◽

Indoor Environments ◽

Passive Mode ◽

Volatile Organic

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26. Determinants of Exposure to Volatile Organic Compounds in Ambient Air: The Oklahoma Urban Air Toxics Study

10.3320/1.2757912 ◽

2003 ◽

Author(s):

M. Phillips ◽

N. Esmen ◽

R. Lynch ◽

D. Johnson ◽

T. Hall

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Ambient Air ◽

Urban Air ◽

Air Toxics ◽

Volatile Organic ◽

Urban Air Toxics

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Occurrence and distribution of indoor volatile organic compounds in residential spaces by sampling methods

Journal of Odor and Indoor Environment ◽

10.15250/joie.2018.17.4.362 ◽

2018 ◽

Vol 17 (4) ◽

pp. 362-371

Author(s):

Suyeon Lee ◽

Daekeun Kim

Keyword(s):

Volatile Organic Compounds ◽

Organic Compounds ◽

Sampling Methods ◽

Volatile Organic

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