Layer-by-layer spectral analysis in a discharge with hollow cathode

1980 ◽  
Vol 33 (2) ◽  
pp. 805-808
Author(s):  
O. A. Grigor'eva ◽  
E. A. Karpova ◽  
Yu. I. Turkin
Keyword(s):  
Spectral Analysis ◽  
Hollow Cathode ◽  
Layer By Layer

Isotopic spectral analysis of hydrogen in a hot hollow cathode

1975 ◽  
Vol 23 (2) ◽  
pp. 1017-1021
Author(s):  
N. A. Zakorina ◽  
A. A. Petrov
Keyword(s):  
Spectral Analysis ◽  
Hollow Cathode

Isotopic spectral analysis of oxygen in a hot hollow cathode

1975 ◽  
Vol 23 (3) ◽  
pp. 1157-1160 ◽  
Author(s):  
N. A. Zakorina ◽  
A. A. Petrov
Keyword(s):  
Spectral Analysis ◽  
Hollow Cathode

A light source for spectral analysis with separate evaporation and excitation in a hollow cathode

1973 ◽  
Vol 18 (5) ◽  
pp. 660-662 ◽  
Author(s):  
A. G. Zhiglinskii ◽  
N. P. Zaretskaya ◽  
Y. I. Turkin
Keyword(s):  
Spectral Analysis ◽  
Light Source ◽  
Hollow Cathode

scholarly journals Получение TiN-покрытий реактивным анодным испарением титана в разряде с самонакаливаемым полым катодом

2021 ◽  
Vol 47 (10) ◽  
pp. 35
Author(s):  
А.И. Меньшаков ◽  
Д.Р. Емлин
Keyword(s):  
Spectral Analysis ◽  
Hollow Cathode ◽  
Discharge Plasma ◽  
Gas Discharge ◽  
Nitrogen Flow ◽  
High Current ◽  
Single Charge ◽  
Vapor Source ◽  
Gas Discharge Plasma ◽  
Tin Coatings

A method for TiN-coatings deposition by anodic evaporation of titanium in a high-current gas discharge (30 A) with a self–heated hollow cathode in an Ar+N2 medium is proposed. Optical spectral analysis shows that a large amount of activated titanium is present in the gas-discharge plasma, and the proportion of metal ions coming from the plasma to the substrate, taking into account the single-charge ions, reaches 70%. At a nitrogen flow of 5 sccm, TiN-coatings with a thickness of 2 µm and a hardness of up to 24 GPa were obtained. The deposition rate at a distance of 7 cm from the vapor source was ~4 µm/h.

A discharge in a cooled hollow cathode as a light source for spectral analysis

1973 ◽  
Vol 19 (5) ◽  
pp. 1397-1399
Author(s):  
O. A. Grigor'eva ◽  
A. G. Zhiglinskii ◽  
Yu. I. Turkin
Keyword(s):  
Spectral Analysis ◽  
Light Source ◽  
Hollow Cathode
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