Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method

1996 ◽  
Vol 15 (4) ◽  
pp. 317-319 ◽  
Author(s):  
K. Rożniatowski ◽  
A. Michalski ◽  
K. J. Kurzydlowski
Keyword(s):  
Thin Films ◽  
Growth Kinetics ◽  
Vapour Deposition ◽  
Quantitative Description ◽  
Physical Vapour Deposition ◽  
Deposition Method ◽  
Tin Thin Films

Synthesis of aluminium nitride thin films by ion-vapour deposition method

1994 ◽  
Vol 68-69 ◽  
pp. 203-207 ◽  
Author(s):  
Yoshikazu Nakamura ◽  
Yoshihisa Watanabe ◽  
Shigekazu Hirayama ◽  
Yuusaku Naota
Keyword(s):  
Thin Films ◽  
Vapour Deposition ◽  
Aluminium Nitride ◽  
Deposition Method

Growth of SnO2 crystalline thin films by mist chemical vapour deposition method

2011 ◽  
Vol 8 (2) ◽  
pp. 540-542 ◽  
Author(s):  
Takeya Okuno ◽  
Takayoshi Oshima ◽  
Sam-Dong Lee ◽  
Shizuo Fujita
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Method ◽  
Chemical Vapour Deposition Method

Room-Temperature Ferromagnetic ZnMnO Thin Films Synthesized by Plasma Enhanced Chemical Vapour Deposition Method

2007 ◽  
Vol 24 (7) ◽  
pp. 2085-2087 ◽  
Author(s):  
Lin Ying-Bin ◽  
Lu Zhi-Hai ◽  
Zou Wen-Qin ◽  
Lu Zhong-Lin ◽  
Xu Jian-Ping ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Room Temperature ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Method ◽  
Chemical Vapour Deposition Method
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