Gas-phase reactions of CF3 and CF2 with hydrogen atoms: Their significance in plasma processing

1984 ◽  
Vol 4 (3) ◽  
pp. 141-146 ◽  
Author(s):  
K. R. Ryan ◽  
I. C. Plumb
1978 ◽  
Vol 43 (14) ◽  
pp. 2800-2802 ◽  
Author(s):  
Osamu Horie ◽  
Junya Nishino ◽  
Akira Amano

Author(s):  
Victor N. Kondratiev ◽  
Evgeniĭ E. Nikitin

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