Control of optical properties of gel-derived oxide coating films containing fine metal particles

1994 ◽  
Vol 2 (1-3) ◽  
pp. 741-744 ◽  
Author(s):  
H. Kozuka ◽  
G. Zhao ◽  
S. Sakka
Keyword(s):  
Optical Properties ◽  
Oxide Coating ◽  
Metal Particles ◽  
Coating Films ◽  
Fine Metal Particles

scholarly journals Tribofilms Produced by Supply of Fine Metal Particles in Vacuum

2011 ◽  
Vol 6 (1) ◽  
pp. 50-54
Author(s):  
Hirotaka Kato ◽  
Akihiro Takimi ◽  
Minoru Umemoto
Keyword(s):  
Metal Particles ◽  
Fine Metal Particles

Investigation of Oxide-Removal of Various Metal Particles for Fabricating MEMS-Based Corrosion Sensor

2009 ◽  
Author(s):  
Feng Pan ◽  
Adam Huang
Keyword(s):  
Oxide Coating ◽  
Metal Particles ◽  
Operating Life ◽  
Metallic Particles ◽  
Sensing Material ◽  
Corrosion Sensor ◽  
Mems Fabrication ◽  
Wide Range ◽  
Titanium Aluminum ◽  
Oxide Removal

Recently, our research group has proposed a MEMS-based solid state corrosion sensor, which is based on embedding metal particle into elastomeric polymers to form a composite-based sensing material. The chemical and dimensional properties of the metal particles and polymer matrix will provide the tailorability in sensor sensitivity, selectivity, time response, and operating life-span. However, the oxidization of metallic particles prior to embedding is adverse for electrical transduction of such sensor. This paper will be based on the investigation of chemical etching protocols used to remove the oxide coating from metal particles without adversely alter the particle itself. The etching process must also be compatible with common MEMS fabrication processes and not limited by the wide range of particle sizes used (30nm–100um). More specifically, metal particles such as Titanium, Aluminum, Nickel, and Stainless Steel are currently being used and investigated.

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