Two-wavelength operation of a tunable KrF excimer laser ? A promising technique for combustion diagnostics

1990 ◽  
Vol 51 (2) ◽  
pp. 91-93 ◽  
Author(s):  
W. Ketterle ◽  
A. Arnold ◽  
M. Sch�fer
Keyword(s):  
Excimer Laser ◽  
Promising Technique ◽  
Combustion Diagnostics ◽  
Krf Excimer Laser

Parametric Investigation of Laser-Assisted Direct Imprint (LADI) Technique

2006 ◽  
Vol 505-507 ◽  
pp. 307-312 ◽  
Author(s):  
C.Y. Lin ◽  
Yung Chun Lee ◽  
Fei Bin Hsiao ◽  
C.H. Chuang
Keyword(s):  
Excimer Laser ◽  
Laser Fluence ◽  
Promising Technique ◽  
New Approach ◽  
Heating Source ◽  
Excimer Laser Pulse ◽  
Machining System ◽  
Conventional Photolithography ◽  
Silicon Materials ◽  
Krf Excimer Laser

Nano-imprinting Lithography (NIL) has been considered as the most promising technique for nano-scaled fabrication and patterning. Recently, a new approach known as Laser-Assisted Direct Imprinting(LADI) has been proposed and demonstrated as an even more efficient way for direct nanofabrication and nanopatterning. In this study, we focused on silicon materials and utilized a single KrF excimer laser pulse (248 nm wavelength and 30 ns pulse duration) as the heating source. Molds of micro-scaled size have been prepared using conventional photolithography techniques. A working platform based on an Excimer Laser Micro-Machining system is constructed for LADI process. The influence of laser fluence and the imprinted pressure on the resulting structures was verifying by varying the laser fluence (1.0 ~ 1.2 J/cm2) and the imprinted load (3 ~ 9kg). The results have shown that the morphology and the imprinted depth were directly related to the laser fluence and the imprinted pressure. Quantitative data are obtained and will be addressed.

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

An Advanced KrF Excimer Laser Stepper For Production Of 16MDRAMs

1988 ◽  
Author(s):  
Hideo Nakagawa ◽  
Masaru Sasago ◽  
Masayuki Endo ◽  
Yushihiko Hirai ◽  
Kazufumi Ogawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Krf Excimer Laser

Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen–air flame

1990 ◽  
Vol 29 (15) ◽  
pp. 2325 ◽  
Author(s):  
Robert W. Pitz ◽  
Joseph A. Wehrmeyer ◽  
J. M. Bowling ◽  
Tsarng-Sheng Cheng
Keyword(s):  
Raman Scattering ◽  
Excimer Laser ◽  
Single Pulse ◽  
Krf Excimer Laser

Experimental study of excimer formation kinetics in a discharge-pumped KrF excimer laser

1994 ◽  
Vol 105 (1-2) ◽  
pp. 133-141 ◽  
Author(s):  
H. Yoshida ◽  
K. Nakamura ◽  
H. Ninomiya ◽  
S. Horiguchi
Keyword(s):  
Experimental Study ◽  
Excimer Laser ◽  
Formation Kinetics ◽  
Excimer Formation ◽  
Krf Excimer Laser
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