Quantification of SIMS depth profiles of ODS-superalloys by using cluster ion formation from reactive primary ions

1994 ◽  
Vol 349 (1-3) ◽  
pp. 140-141 ◽  
Author(s):  
S. Oswald ◽  
W. J. Quadakkers
Keyword(s):  
Depth Profiles ◽  
Ion Formation ◽  
Cluster Ion ◽  
Primary Ions

Gas cluster ion bombardment of GaAs: XPS depth profiles and molecular dynamics modelling

2021 ◽  
Author(s):  
Helen Oppong-Mensah ◽  
Mark A. Baker ◽  
Tim S. Nunney ◽  
Richard G. White ◽  
Jonathon England ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Ion Bombardment ◽  
Depth Profiles ◽  
Cluster Ion ◽  
Dynamics Modelling

Depth profiles of cluster-ion-implanted BSi in silicon

2002 ◽  
Vol 190 (1-4) ◽  
pp. 767-771 ◽  
Author(s):  
Jenq-Horng Liang ◽  
Shiaw-Lung Chiang ◽  
Chin-Tsai Chen ◽  
Huan Niu ◽  
Mao-Sheng Tseng
Keyword(s):  
Depth Profiles ◽  
Cluster Ion ◽  
Ion Implanted

Cluster-ion formation by heavy-ion-induced electronic sputtering

1997 ◽  
Author(s):  
N. Imanishi ◽  
S. Kyoh ◽  
K. Takakuwa ◽  
M. Umezawa ◽  
Y. Akahane ◽  
...  
Keyword(s):  
Heavy Ion ◽  
Ion Formation ◽  
Cluster Ion
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