The Control of Membrane Thickness in PECVD Process Utilizing a Rule Extraction Technique of Neural Networks
2006 ◽
pp. 1091-1098
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2012 ◽
Vol 43
(1)
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pp. 1196-1203
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1999 ◽
Vol 20
(3)
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pp. 273-280
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Keyword(s):
1999 ◽
Vol 3
(5)
◽
pp. 348-356
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2007 ◽
Vol 3
(8)
◽
pp. 592-599
◽
Keyword(s):
Keyword(s):