Chip Speed Prediction Model for Optimization of Semiconductor Manufacturing Process Using Neural Networks and Statistical Methods

Author(s):  
Tae Seon Kim
2020 ◽  
Vol 2020 ◽  
pp. 1-18
Author(s):  
Chih-Chiang Wei

Taiwan, being located on a path in the west Pacific Ocean where typhoons often strike, is often affected by typhoons. The accompanying strong winds and torrential rains make typhoons particularly damaging in Taiwan. Therefore, we aimed to establish an accurate wind speed prediction model for future typhoons, allowing for better preparation to mitigate a typhoon’s toll on life and property. For more accurate wind speed predictions during a typhoon episode, we used cutting-edge machine learning techniques to construct a wind speed prediction model. To ensure model accuracy, we used, as variable input, simulated values from the Weather Research and Forecasting model of the numerical weather prediction system in addition to adopting deeper neural networks that can deepen neural network structures in the construction of estimation models. Our deeper neural networks comprise multilayer perceptron (MLP), deep recurrent neural networks (DRNNs), and stacked long short-term memory (LSTM). These three model-structure types differ by their memory capacity: MLPs are model networks with no memory capacity, whereas DRNNs and stacked LSTM are model networks with memory capacity. A model structure with memory capacity can analyze time-series data and continue memorizing and learning along the time axis. The study area is northeastern Taiwan. Results showed that MLP, DRNN, and stacked LSTM prediction error rates increased with prediction time (1–6 hours). Comparing the three models revealed that model networks with memory capacity (DRNN and stacked LSTM) were more accurate than those without memory capacity. A further comparison of model networks with memory capacity revealed that stacked LSTM yielded slightly more accurate results than did DRNN. Additionally, we determined that in the construction of the wind speed prediction model, the use of numerically simulated values reduced the error rate approximately by 30%. These results indicate that the inclusion of numerically simulated values in wind speed prediction models enhanced their prediction accuracy.


CICTP 2020 ◽  
2020 ◽  
Author(s):  
Qianqian Liang ◽  
Xiaodong Zhang ◽  
Jinliang Xu ◽  
Yang Zhang

Author(s):  
Anqi Qiu ◽  
William Lowe ◽  
Mridul Arora

Abstract Nanoprobing systems have evolved to meet the challenges from recent innovations in the semiconductor manufacturing process. This is demonstrated through an exhibition of standard SRAM measurements on TSMC 7 nm FinFET technology. SEM based nanoprober is shown to meet or exceed the requirements for measuring 7nm technology and beyond. This paper discusses in detail of the best-known methods for nanoprobing on 7nm technology.


2019 ◽  
Vol 44 (3) ◽  
pp. 266-281 ◽  
Author(s):  
Zhongda Tian ◽  
Yi Ren ◽  
Gang Wang

Wind speed prediction is an important technology in the wind power field; however, because of their chaotic nature, predicting wind speed accurately is difficult. Aims at this challenge, a backtracking search optimization–based least squares support vector machine model is proposed for short-term wind speed prediction. In this article, the least squares support vector machine is chosen as the short-term wind speed prediction model and backtracking search optimization algorithm is used to optimize the important parameters which influence the least squares support vector machine regression model. Furthermore, the optimal parameters of the model are obtained, and the short-term wind speed prediction model of least squares support vector machine is established through parameter optimization. For time-varying systems similar to short-term wind speed time series, a model updating method based on prediction error accuracy combined with sliding window strategy is proposed. When the prediction model does not match the actual short-term wind model, least squares support vector machine trains and re-establishes. This model updating method avoids the mismatch problem between prediction model and actual wind speed data. The actual collected short-term wind speed time series is used as the research object. Multi-step prediction simulation of short-term wind speed is carried out. The simulation results show that backtracking search optimization algorithm–based least squares support vector machine model has higher prediction accuracy and reliability for the short-term wind speed. At the same time, the prediction performance indicators are also improved. The prediction result is that root mean square error is 0.1248, mean absolute error is 0.1374, mean absolute percentile error is 0.1589% and R2 is 0.9648. When the short-term wind speed varies from 0 to 4 m/s, the average value of absolute prediction error is 0.1113 m/s, and average value of absolute relative prediction error is 8.7111%. The proposed prediction model in this article has high engineering application value.


2015 ◽  
Vol 781 ◽  
pp. 628-631 ◽  
Author(s):  
Rati Wongsathan ◽  
Issaravuth Seedadan ◽  
Metawat Kavilkrue

A mathematical prediction model has been developed in order to detect particles with a diameter of 10 micrometers or less (PM-10) that are responsible for adverse health effects because of their ability to cause serious respiratory conditions in areas of high pollution such as Chiang Mai City moat area. The prediction model is based on 3 types of Artificial Neural Networks (ANNs), including Multi-layer perceptron (MLP-NN), Radial basis function (RBF-NN), and hybrid of RBF and Genetic algorithm (RBF-NN-GA). The model uses 8 input variables to predict PM-10, consisting of 4 air pollution substances ( CO, O3, NO2 and SO2) and 4 meteorological variables related PM-10 (wind speed, temperature, atmospheric pressure and relative humidity). These 3 types of ANN have proved efficient instrument in predicting the PM-10. However, the performance of RBF-NN was superior in comparison with MLP-NN and RBF-NN-GA respectively.


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