Pressure sensing by electrical admittance measurement of a comb-drive actuator
2007 ◽
Vol 2
(3)
◽
pp. 335-339
◽
2007 ◽
Vol 2
(3)
◽
pp. xxv-xxvi
2006 ◽
Vol 126
(7)
◽
pp. 281-285
◽
2012 ◽
Vol 132
(1)
◽
pp. 1-9
◽
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