Some Applications of high-energy, high-resolution Auger electron spectroscopy using bremsstrahlung radiation

1992 ◽  
Vol 19 (1-12) ◽  
pp. 9-15 ◽  
Author(s):  
L. Kövér ◽  
D. Varga ◽  
I. Cserny ◽  
J. Tóth ◽  
K. Tökési
Keyword(s):  
High Resolution ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
High Energy ◽  
Bremsstrahlung Radiation

Advances In Analytical Auger Electron Spectroscopy

MRS Bulletin ◽  
1987 ◽  
Vol 12 (6) ◽  
pp. 70-74 ◽  
Author(s):  
Chuan C. Chang
Keyword(s):  
Quantitative Analysis ◽  
High Resolution ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Depth Profiling ◽  
Auger Spectroscopy ◽  
High Resolution Imaging ◽  
Auger Analysis ◽  
Resolution Imaging

AbstractFundamental principles and experimental procedures for fully utilizing the power of Auger analysis are discussed. Topics include: quantitative analysis, high resolution imaging, depth profiling, and noise reduction. These studies reveal several improvements that might be expected in the immediate future and how they might be achieved. Some knowledge of Auger spectroscopy is assumed, but references on theory, principles, instrumentation, and applications are cited.

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