Review on the thickness measurement of ultrathin oxide films by mutual calibration method
Keyword(s):
2006 ◽
Vol 35
(12)
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pp. 2142-2146
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2008 ◽
Vol 128
(16)
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pp. 164712
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Keyword(s):
2009 ◽
Vol 80
(4)
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pp. 046106
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2008 ◽
Vol 49
(S1)
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pp. 174-189
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Keyword(s):
2012 ◽
Vol 14
(2)
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pp. 023025
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