Self‐ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation‐induced atomic intermixing and degraded film properties

2020 ◽  
Vol 52 (9) ◽  
pp. 553-568
Author(s):  
Jiao Xu ◽  
Li Qiao ◽  
Zewen Duan ◽  
Dengji Guo ◽  
Liqiang Chai ◽  
...  
2008 ◽  
Vol 47 (4) ◽  
pp. 2200-2204 ◽  
Author(s):  
Ya-Hsin Yang ◽  
Kuen Yi Wu ◽  
Chin-Yang Lee ◽  
Ming Yu Chen ◽  
Jennchang Hwang ◽  
...  

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