Effect of low-energy ion impact on the structure of hexagonal boron nitride films studied in surface-wave plasma

2018 ◽  
Vol 51 (1) ◽  
pp. 126-130 ◽  
Author(s):  
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S. Matsumoto
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Author(s):  
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K. Teii ◽  
S. Matsumoto

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Owing to its irreplaceable roles in new functional devices, such as universal substrates and excellent layered insulators, high-quality hexagonal BN (hBN) crystals are exceedingly required in the field of two-dimensional...


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