Characteristics of phase transition in boron-implanted Ge2 Sb2 Te5 thin films for phase change memory applications

2014 ◽  
Vol 46 (12-13) ◽  
pp. 1178-1182 ◽  
Author(s):  
D. S. Chao ◽  
P. H. Lee ◽  
J. H. Liang ◽  
P. C. Chang ◽  
T. S. Chin
2014 ◽  
Vol 31 (7) ◽  
pp. 078503
Author(s):  
Shi-Yu Tang ◽  
Run Li ◽  
Xin Ou ◽  
Han-Ni Xu ◽  
Yi-Dong Xia ◽  
...  

2011 ◽  
Vol 109 (6) ◽  
pp. 066104 ◽  
Author(s):  
Hao Jiang ◽  
Kang Guo ◽  
Hanni Xu ◽  
Yidong Xia ◽  
Kun Jiang ◽  
...  

2017 ◽  
Vol 10 (5) ◽  
pp. 055504 ◽  
Author(s):  
Zifang He ◽  
Shiyu Chen ◽  
Weihua Wu ◽  
Jiwei Zhai ◽  
Sannian Song ◽  
...  

2007 ◽  
Vol 1056 ◽  
Author(s):  
Feiming Bai ◽  
Surendra Gupta ◽  
Archana Devasia ◽  
Santosh Kurinec ◽  
Morgan Davis ◽  
...  

ABSTRACTPhase transitions in stacked GeTe/SnTe and Ge2Se3/SnTe thin layers for potential phase-change memory applications have been investigated by X-ray diffraction using a two-dimensional area detector system. The as-deposited underlying GeTe or Ge2Se3 layer is amorphous, whereas the top SnTe layer is crystalline. In the GeTe/SnTe stack, the crystallization of GeTe phase occurs near 170°C, and upon further heating, the GeTe phase disappears, followed by the formation of rocksalt-structured GexSn1−xTe solid solution. In the Ge2Se3/SnTe stack, the phase transition starts with the separation of a SnSe phase due to the migration of Sn ions into the Ge2Se3 layer. SnSe is believed to facilitate the crystallization of Ge2Se3-SnTe solid solution at ∼360°C, which is much lower than the crystallization temperature of Ge2Se3, therefore consuming less power during the phase transition.


2010 ◽  
Vol 157 (12) ◽  
pp. P113 ◽  
Author(s):  
Yu-Jen Huang ◽  
Tzu-Chin Chung ◽  
Chiung-Hsin Wang ◽  
Tsung-Eong Hsieh

2016 ◽  
Vol 432 ◽  
pp. 505-509 ◽  
Author(s):  
Yi Lu ◽  
Yifeng Hu ◽  
Li Yuan ◽  
Xiaoqin Zhu ◽  
Hua Zou ◽  
...  

2016 ◽  
Vol 163 ◽  
pp. 20-23 ◽  
Author(s):  
Ruirui Liu ◽  
Zifang He ◽  
Jiwei Zhai ◽  
Sannian Song ◽  
Zhitang Song ◽  
...  

RSC Advances ◽  
2017 ◽  
Vol 7 (88) ◽  
pp. 56000-56005 ◽  
Author(s):  
Hua Zou ◽  
Liangjun Zhai ◽  
Yifeng Hu ◽  
Xiaoqin Zhu ◽  
Haipeng You ◽  
...  

Thermal stability of phase change films is key for phase change memory applications. Sm doped Sn15Sb85 thin films were prepared by magnetron sputtering. Compared with none doped films, the thermal stability of the film was significantly improved.


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