Selective functionalization of silicon surface controlled by metastable helium atom beam for patterning chemisorbed monolayer molecular assemblies

Z. P. Wang; J. W. Zhang; Z. M. Zhang; Z. J. Ding; Y. Yamauchi

doi:10.1002/sia.5598

Selective functionalization of silicon surface controlled by metastable helium atom beam for patterning chemisorbed monolayer molecular assemblies

Surface and Interface Analysis ◽

10.1002/sia.5598 ◽

2014 ◽

Vol 46 (12-13) ◽

pp. 1196-1199 ◽

Cited By ~ 1

Author(s):

Z. P. Wang ◽

J. W. Zhang ◽

Z. M. Zhang ◽

Z. J. Ding ◽

Y. Yamauchi

Keyword(s):

Helium Atom ◽

Silicon Surface ◽

Atom Beam ◽

Molecular Assemblies ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Selective Functionalization

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The Improved Self-assembled Monolayer of Octadecyltrichlorosilane as Positive Resist for Patterning Silicon Surface by Metastable Helium Atom Beam Lithography

Physics Procedia ◽

10.1016/j.phpro.2012.03.596 ◽

2012 ◽

Vol 32 ◽

pp. 525-531

Author(s):

Z.P. Wang ◽

M. Kurahashi ◽

T. Suzuki ◽

X. Sun ◽

Z.M. Zhang ◽

...

Keyword(s):

Helium Atom ◽

Silicon Surface ◽

Atom Beam ◽

Self Assembled Monolayer ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Self Assembled ◽

Positive Resist

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Spin polarization of the Si(111)-7×7 surface: A study with a spin-polarized metastable helium atom beam

Surface Science ◽

10.1016/j.susc.2010.12.027 ◽

2011 ◽

Vol 605 (5-6) ◽

pp. 612-615 ◽

Cited By ~ 3

Author(s):

M. Kurahashi ◽

A. Pratt ◽

Y. Yamauchi

Keyword(s):

Helium Atom ◽

Spin Polarization ◽

Atom Beam ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Spin Polarized

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Extremely surface-sensitive hysteresis loop measurement with a spin-polarized metastable helium atom beam

Applied Physics Letters ◽

10.1063/1.1800279 ◽

2004 ◽

Vol 85 (14) ◽

pp. 2869-2871 ◽

Cited By ~ 14

Author(s):

M. Kurahashi ◽

T. Suzuki ◽

Y. Yamauchi

Keyword(s):

Hysteresis Loop ◽

Helium Atom ◽

Atom Beam ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Spin Polarized ◽

Loop Measurement

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Characterization of nanoscale patterns prepared by metastable helium atom beam and butanethiol self-assembled monolayers

Thin Solid Films ◽

10.1016/s0040-6090(03)00808-3 ◽

2003 ◽

Vol 438-439 ◽

pp. 128-131 ◽

Cited By ~ 5

Author(s):

Xin Ju ◽

Mitsunori Kurahashi ◽

Taku Suzuki ◽

Yasushi Yamauchi

Keyword(s):

Helium Atom ◽

Self Assembled Monolayers ◽

Atom Beam ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Assembled Monolayers ◽

Nanoscale Patterns ◽

Self Assembled

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Silicon Micro/Nanofabrication Using Metastable Helium Atom Beam Lithography

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2010.2853 ◽

2010 ◽

Vol 10 (11) ◽

pp. 7443-7446

Author(s):

Z. P. Wang ◽

M. Kurahashi ◽

T. Suzuki ◽

Z. J. Ding ◽

Y. Yamauchi

Keyword(s):

Helium Atom ◽

Atom Beam ◽

Metastable Helium ◽

Metastable Helium Atom

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Shift of the magnetic resonance frequency in a system consisting of a metastable helium atom and a potassium atom in the ground state

Technical Physics ◽

10.1134/s1063784207010227 ◽

2007 ◽

Vol 52 (1) ◽

pp. 123-125

Author(s):

V. A. Kartoshkin

Keyword(s):

Magnetic Resonance ◽

Resonance Frequency ◽

Helium Atom ◽

Ground State ◽

Potassium Atom ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Magnetic Resonance Frequency

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Metastable helium atom density in a single electrode atmospheric plasma jet during sample treatment

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/3/035023 ◽

2016 ◽

Vol 25 (3) ◽

pp. 035023 ◽

Cited By ~ 11

Author(s):

R Zaplotnik ◽

M Bišćan ◽

D Popović ◽

M Mozetič ◽

S Milošević

Keyword(s):

Helium Atom ◽

Plasma Jet ◽

Atmospheric Plasma ◽

Sample Treatment ◽

Atom Density ◽

Metastable Helium ◽

Metastable Helium Atom

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Metastable helium atom concentrations in the earth's atmosphere

Planetary and Space Science ◽

10.1016/0032-0633(62)90127-7 ◽

1962 ◽

Vol 9 (10) ◽

pp. 701-710 ◽

Cited By ~ 23

Author(s):

E.E. Ferguson ◽

H. Schlüter

Keyword(s):

Helium Atom ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Earth’S Atmosphere ◽

Earth's Atmosphere

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Spin polarization transfer in ground and metastable helium atom collisions

New Journal of Physics ◽

10.1088/1367-2630/12/6/065039 ◽

2010 ◽

Vol 12 (6) ◽

pp. 065039 ◽

Cited By ~ 3

Author(s):

D Vrinceanu ◽

H R Sadeghpour

Keyword(s):

Helium Atom ◽

Spin Polarization ◽

Polarization Transfer ◽

Metastable Helium ◽

Metastable Helium Atom

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Fast helium atom beams generated by pulsing the nozzle-skimmer discharge of a thermal metastable helium atom source

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(00)00411-0 ◽

2001 ◽

Vol 173 (4) ◽

pp. 516-522 ◽

Cited By ~ 5

Author(s):

Mitsunori Kurahashi ◽

Yasushi Yamauchi

Keyword(s):

Helium Atom ◽

Metastable Helium ◽

Metastable Helium Atom ◽

Atom Source

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