Analysis technique for ultra shallow junction using medium energy ion scattering time-of-flight elastic recoil detection analysis

Satoshi Abo; Ri Pei; Yao Xin Yuan; Fujio Wakaya; Mikio Takai

doi:10.1002/sia.5590

Analysis technique for ultra shallow junction using medium energy ion scattering time-of-flight elastic recoil detection analysis

Surface and Interface Analysis ◽

10.1002/sia.5590 ◽

2014 ◽

Vol 46 (12-13) ◽

pp. 1192-1195

Author(s):

Satoshi Abo ◽

Ri Pei ◽

Yao Xin Yuan ◽

Fujio Wakaya ◽

Mikio Takai

Keyword(s):

Time Of Flight ◽

Medium Energy ◽

Ion Scattering ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Analysis Technique ◽

Medium Energy Ion Scattering ◽

Scattering Time

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Quantitative hydrogen analysis through time of flight-elastic recoil detection analysis using medium energy ions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2018.11.005 ◽

2019 ◽

Vol 450 ◽

pp. 310-314

Author(s):

Kyungsu Park ◽

Jwa Soon Kim ◽

Sung Yup An ◽

Kwang Hwan Jung ◽

Soobang Kim ◽

...

Keyword(s):

Time Of Flight ◽

Medium Energy ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Hydrogen Analysis

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Adsorption of H on the Ge/Si(001) Surface as Studied by Time-of-Flight Elastic Recoil Detection Analysis and Coaxial Impact Collision Ion Scattering Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.1359 ◽

1999 ◽

Vol 38 (Part 1, No. 3A) ◽

pp. 1359-1362 ◽

Cited By ~ 8

Author(s):

Takashi Fuse ◽

Jeong-Tak Ryu ◽

Toshiaki Fujino ◽

Katsuhiko Inudzuka ◽

Mitsuhiro Katayama ◽

...

Keyword(s):

Time Of Flight ◽

Ion Scattering ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Ion Scattering Spectroscopy

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In situ monitoring of hydrogen-surfactant effect during Ge growth on Si(001) using coaxial impact-collision ion scattering spectroscopy and time-of-flight elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(99)00777-6 ◽

2000 ◽

Vol 161-163 ◽

pp. 419-423 ◽

Cited By ~ 3

Author(s):

Toshiaki Fujino ◽

Takashi Fuse ◽

Eisuke Tazou ◽

Toshiaki Nakano ◽

Katsuhiko Inudzuka ◽

...

Keyword(s):

Time Of Flight ◽

In Situ Monitoring ◽

Ion Scattering ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Surfactant Effect ◽

Detection Analysis ◽

Ion Scattering Spectroscopy

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Exploring surface processes by coaxial impact-collision ion scattering spectroscopy and time-of-flight elastic recoil detection analysis

Current Applied Physics ◽

10.1016/s1567-1739(02)00238-9 ◽

2003 ◽

Vol 3 (1) ◽

pp. 65-69 ◽

Cited By ~ 2

Author(s):

Mitsuhiro Katayama

Keyword(s):

Time Of Flight ◽

Surface Processes ◽

Ion Scattering ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Ion Scattering Spectroscopy

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Time detector design for Time-of-Flight Elastic Recoil Detection Analysis (ToF-E ERDA)

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2018.11.010 ◽

2019 ◽

Vol 450 ◽

pp. 385-389

Author(s):

Harry J. Whitlow ◽

Patrick Jeanneret ◽

Edouard Guibert ◽

Liping Wang ◽

Mathijs Van Der Meer

Keyword(s):

Time Of Flight ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Detector Design

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Time of flight assistedΔE-Emethod for enhanced isotope separation capabilities in heavy ion elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2017.02.056 ◽

2017 ◽

Vol 406 ◽

pp. 10-14 ◽

Cited By ~ 1

Author(s):

S. Eschbaumer ◽

A. Bergmaier ◽

D. Seiler ◽

G. Dollinger

Keyword(s):

Isotope Separation ◽

Time Of Flight ◽

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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A gas ionisation detector in the axial (Bragg) geometry used for the time-of-flight elastic recoil detection analysis

Review of Scientific Instruments ◽

10.1063/1.4927605 ◽

2015 ◽

Vol 86 (8) ◽

pp. 083301 ◽

Cited By ~ 11

Author(s):

Zdravko Siketić ◽

Natko Skukan ◽

Iva Bogdanović Radović

Keyword(s):

Time Of Flight ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Bragg Geometry ◽

Ionisation Detector

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Quantitative analysis of hydrogen in thin films using Time-of-Flight Elastic Recoil Detection Analysis

Thin Solid Films ◽

10.1016/j.tsf.2009.07.196 ◽

2010 ◽

Vol 518 (10) ◽

pp. 2617-2622 ◽

Cited By ~ 12

Author(s):

Zdravko Siketić ◽

Iva Bogdanović Radović ◽

Milko Jakšić

Keyword(s):

Thin Films ◽

Quantitative Analysis ◽

Time Of Flight ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Separation of mass-overlapped time of flight–energy elastic recoil detection analysis data using Ryan and Jamieson's dynamic analysis method

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(01)00520-1 ◽

2001 ◽

Vol 179 (3) ◽

pp. 403-411 ◽

Cited By ~ 3

Author(s):

Leif Persson ◽

Harry J Whitlow ◽

Mohamed El Bouanani ◽

Mikael Hult ◽

Margaretha Andersson ◽

...

Keyword(s):

Dynamic Analysis ◽

Time Of Flight ◽

Analysis Data ◽

Analysis Method ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Electron-stimulated desorption of hydrogen from H/Si(001)-1×1 surface studied by time-of-flight elastic recoil detection analysis

Surface Science ◽

10.1016/s0039-6028(98)00827-9 ◽

1999 ◽

Vol 420 (1) ◽

pp. 81-86 ◽

Cited By ~ 20

Author(s):

Takashi Fuse ◽

Toshiaki Fujino ◽

Jeong-Tak Ryu ◽

Mitsuhiro Katayama ◽

Kenjiro Oura

Keyword(s):

Time Of Flight ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Electron Stimulated Desorption

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