The relationship between end-group concentrations and stability of spin-coated thin polymer films investigated by ToF-SIMS depth profiling

2013 ◽  
Vol 45 (8) ◽  
pp. 1291-1296 ◽  
Author(s):  
Xianwen Ren ◽  
Lu-Tao Weng ◽  
Chi-Ming Chan ◽  
Kai-Mo Ng
Keyword(s):  
Polymer Films ◽  
Depth Profiling ◽  
Thin Polymer Films ◽  
Tof Sims ◽  
Thin Polymer ◽  
The Relationship ◽  
End Group ◽  
Sims Depth Profiling

Depth profiling studies of the surface directed phase decomposition in thin polymer films

Vacuum ◽  
1999 ◽  
Vol 54 (1-4) ◽  
pp. 303-307 ◽  
Author(s):  
J. Rysz ◽  
H. Ermer ◽  
A. Budkowski ◽  
M. Lekka ◽  
A. Bernasik ◽  
...  
Keyword(s):  
Polymer Films ◽  
Depth Profiling ◽  
Phase Decomposition ◽  
Thin Polymer Films ◽  
Thin Polymer

Diffusion and Distribution of Photoacid Generators in thin Polymer Films

1999 ◽  
Vol 584 ◽  
Author(s):  
Qinghuang Lin ◽  
Marie Angelopoulos ◽  
Katherina Babich ◽  
David Medeiros ◽  
Narayan Sundararajan ◽  
...  
Keyword(s):  
Polymer Films ◽  
Rutherford Backscattering Spectrometry ◽  
Depth Profiling ◽  
Bilayer Film ◽  
Cross Linking ◽  
Thin Polymer Films ◽  
Photoacid Generators ◽  
Thin Polymer ◽  
Temperature Deposition ◽  
And Diffusion

AbstractDistribution and diffusion of two fluorinated ionic photoacid generators (PAGs) in thin polymer films have been investigated by depth profiling of the intrinsic label elements of both the PAGs and a silicon containing carrier polymer with Rutherford Backscattering Spectrometry (RBS) and dynamic Secondary Ion Mass Spectroscopy (SIMS). Distribution and diffusion of the PAGs in a bilayer film stack, which consists of a thin silicon containing polymer film on top of a thick thermally cross-linked Novolak film on a silicon substrate, have been studied as a function of the Novolak cross-linking temperature. Deposition of the PAG containing polymer films on top of the cross-linked Novolak films by spin coating results in an interphase with enriched PAG. Subsequent annealing of the film stack causes expansion of the interphase and diffusion of the PAG into the underlying Novolak film when Novolak is cross-linked at lower temperatures. On the other hand, there is a uniform PAG distribution and no detectable diffusion of the PAG into Novolak when it is cross-linked at high temperatures. The variations in the PAG distribution and diffusion are attributed to the changes in the chemical and physical properties of Novolak during cross-linking.

Is the chain dynamics in thin polymer films isotropic ?

2000 ◽  
Vol 10 (PR7) ◽  
pp. Pr7-233-Pr7-237 ◽  
Author(s):  
S. Rivillon ◽  
P. Auroy ◽  
B. Deloche
Keyword(s):  
Polymer Films ◽  
Thin Polymer Films ◽  
Chain Dynamics ◽  
Thin Polymer

Reducing the сontact angle hysteresis of thin polymer films by oil impregnation in supercritical carbon dioxide

2021 ◽  
Vol 154 ◽  
pp. 106202
Author(s):  
Polina S. Kazaryan ◽  
Maria A. Agalakova ◽  
Elena P. Kharitonova ◽  
Marat O. Gallyamov ◽  
Mikhail S. Kondratenko
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Polymer Films ◽  
Thin Polymer Films ◽  
Thin Polymer ◽  
Oil Impregnation ◽  
Supercritical Carbon
Sign in / Sign up

Export Citation Format

Share Document