Effect of post-deposition annealing on surface morphology and gas sensing properties of palladium phthalocyanine thin films

2012 ◽  
Vol 44 (5) ◽  
pp. 601-608 ◽  
Author(s):  
Mohammad Javad Jafari ◽  
Mohammad Esmaeil Azim-Araghi ◽  
Samira Barhemat ◽  
Sobhenaz Riyazi
Keyword(s):  
Thin Films ◽  
Surface Morphology ◽  
Gas Sensing ◽  
Post Deposition Annealing ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Post Deposition

Effect of Post-Deposition Annealing Treatment on the Structural, Optical and Gas Sensing Properties of TiO2 Thin Films

2012 ◽  
Vol 510-511 ◽  
pp. 467-474 ◽  
Author(s):  
A.A. Haidry ◽  
P. Durina ◽  
M. Tomasek ◽  
J. Gregus ◽  
P. Schlosser ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Annealing Treatment ◽  
Sensor Technology ◽  
Electrical Measurements ◽  
Post Deposition Annealing ◽  
Sensing Properties ◽  
Vis Spectroscopy ◽  
Gas Sensing Properties ◽  
Post Deposition

One of the potential applications of TiO2 is its use in gas sensor technology. The aim of this work was to study the gas sensing properties of TiO2 thin films in combination with the effect of post-deposition annealing treatment. Titanium dioxide thin films with thickness 100 nm were prepared by the reactive dc magnetron sputtering. The thin films were deposited on sapphire substrate from a titanium target in an oxygen atmosphere. The samples were then post-annealed in air in the temperature range 600 °C 1000 °C. Crystal structure, surface topography and absorption edge of the thin films have been studied by X-ray Diffraction technique, Atomic Force Microscopy and UV-VIS Spectroscopy. It was found that the phase gradually changed from anatase to rutile, the grain size and roughness tended to increase with increasing post-annealing temperature. The effect of these factors on gas sensing properties was discussed. For electrical measurements comb-like Pt electrodes were prepared by standard photolithography and the films were exposed to different concentrations of H2 gas up to 10000 ppm in synthetic air at various operating temperatures from 200 °C to 350 °C.

Structural, morphological and gas sensing properties of Zn1−xSnxO thin films by SILAR method

2021 ◽  
Vol 127 (4) ◽  
Author(s):  
Irmak Karaduman Er ◽  
Memet Ali Yıldırım ◽  
H. Hasan Örkçü ◽  
Aytunç Ateş ◽  
Selim Acar
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Silar Method ◽  
Sensing Properties ◽  
Gas Sensing Properties

Polyaniline/SnO2 Nanocomposite Sensor for NO2 Gas Sensing at Low Operating Temperature

2015 ◽  
Vol 14 (04) ◽  
pp. 1550011 ◽  
Author(s):  
A. Sharma ◽  
M. Tomar ◽  
V. Gupta ◽  
A. Badola ◽  
N. Goswami
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
High Sensitivity ◽  
Morphological Properties ◽  
X Ray Diffraction ◽  
Chemical Route ◽  
Sensing Properties ◽  
Response Recovery ◽  
Transmission Electron ◽  
Gas Sensing Properties

In this paper gas sensing properties of 0.5–3% polyaniline (PAni) doped SnO 2 thin films sensors prepared by chemical route have been studied towards the trace level detection of NO 2 gas. The structural, optical and surface morphological properties of the PAni doped SnO 2 thin films were investigated by performing X-ray diffraction (XRD), Transmission electron microscopy (TEM) and Raman spectroscopy measurements. A good correlation has been identified between the microstructural and gas sensing properties of these prepared sensors. Out of these films, 1% PAni doped SnO 2 sensor showed high sensitivity towards NO 2 gas along with a sensitivity of 3.01 × 102 at 40°C for 10 ppm of gas. On exposure to NO 2 gas, resistance of all sensors increased to a large extent, even greater than three orders of magnitude. These changes in resistance upon removal of NO 2 gas are found to be reversible in nature and the prepared composite film sensors showed good sensitivity with relatively faster response/recovery speeds.

A comparative study on the NO2 gas sensing properties of ZnO thin films, nanowires and nanorods

2011 ◽  
Vol 520 (3) ◽  
pp. 932-938 ◽  
Author(s):  
S. Öztürk ◽  
N. Kılınç ◽  
N. Taşaltin ◽  
Z.Z. Öztürk
Keyword(s):  
Thin Films ◽  
Comparative Study ◽  
Gas Sensing ◽  
Zno Thin Films ◽  
Sensing Properties ◽  
Gas Sensing Properties

Characterization and NO2 gas sensing properties of spray pyrolyzed SnO2 thin films

2017 ◽  
Vol 127 ◽  
pp. 38-46 ◽  
Author(s):  
Dilip L. Kamble ◽  
Namdev S. Harale ◽  
Vithoba L. Patil ◽  
Pramod S. Patil ◽  
Laxman D. Kadam
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Sno2 Thin Films

Hydrogen gas sensing properties of WO3 sputter-deposited thin films enhanced by on-top deposited CuO nanoclusters

2018 ◽  
Vol 43 (50) ◽  
pp. 22756-22764 ◽  
Author(s):  
Stanislav Haviar ◽  
Jiří Čapek ◽  
Šárka Batková ◽  
Nirmal Kumar ◽  
Filip Dvořák ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Hydrogen Gas ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Sputter Deposited
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