Mechanical properties of hydrogenated nanocrystalline silicon thin film with different indentation depths
2014 ◽
Vol 18
(sup4)
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pp. S4-1017-S4-1020
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Keyword(s):
2007 ◽
2013 ◽
Vol 13
(12)
◽
pp. 7891-7894
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Keyword(s):
2010 ◽
Vol 94
(9)
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pp. 1522-1527
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Keyword(s):
Keyword(s):
2010 ◽
Vol 31
(3)
◽
pp. 222-224
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2006 ◽
Vol 134
(1)
◽
pp. 99-102
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Keyword(s):