The Pegase project, a new solid surface probe: focused massive cluster ion beams

2010 ◽  
Vol 43 (1-2) ◽  
pp. 66-69 ◽  
Author(s):  
S. Della-Negra ◽  
J. Arianer ◽  
J. Depauw ◽  
S. V. Verkhoturov ◽  
E. A. Schweikert
Keyword(s):  
Solid Surface ◽  
Ion Beams ◽  
Surface Probe ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Massive Cluster

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas

Morphology dependence of surface smoothing of Ar gas cluster ion beams

2005 ◽  
pp. 241-244
Author(s):  
S. Houzumi ◽  
T. Mashita ◽  
N. Toyoda ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ar Gas

Surface modifications by gas cluster ion beams

1996 ◽  
pp. 165-169
Author(s):  
I. Yamada ◽  
J. Matsuo ◽  
Z. Insepov ◽  
M. Akizuki
Keyword(s):  
Surface Modifications ◽  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion

Sputtering Yields for Gold Using Argon Gas Cluster Ion Beams

2012 ◽  
Vol 116 (44) ◽  
pp. 23735-23741 ◽  
Author(s):  
Li Yang ◽  
Martin P. Seah ◽  
Ian S. Gilmore
Keyword(s):  
Ion Beams ◽  
Argon Gas ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Sputtering Yields
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