Interface characterization of a metal-oxide-semiconductor structure by biased X-ray photoelectron spectroscopy

M. Yoshitake; K. Ohmori; T. Chikyow

doi:10.1002/sia.3154

Interface characterization of a metal-oxide-semiconductor structure by biased X-ray photoelectron spectroscopy

Surface and Interface Analysis ◽

10.1002/sia.3154 ◽

2010 ◽

Vol 42 (2) ◽

pp. 70-76 ◽

Cited By ~ 1

Author(s):

M. Yoshitake ◽

K. Ohmori ◽

T. Chikyow

Keyword(s):

Metal Oxide ◽

Photoelectron Spectroscopy ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

X Ray ◽

Interface Characterization ◽

Metal Oxide Semiconductor Structure

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Effect of thermal annealing and oxygen partial pressure on the swelling of HfO2/SiO2/Si metal-oxide-semiconductor structure grown by rf sputtering: A synchrotron x-ray reflectivity study

Applied Physics Letters ◽

10.1063/1.4896157 ◽

2014 ◽

Vol 105 (11) ◽

pp. 113511 ◽

Cited By ~ 8

Author(s):

Debaleen Biswas ◽

Sk Abdul Kader Md Faruque ◽

Anil Kumar Sinha ◽

Anuj Upadhyay ◽

Supratic Chakraborty

Keyword(s):

Metal Oxide ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Thermal Annealing ◽

Rf Sputtering ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

X Ray ◽

Metal Oxide Semiconductor Structure

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One- and two-dimensional characterization of power metal–oxide–semiconductor structure by spreading resistance profiling: From the profiles to the I–V curves

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588476 ◽

1996 ◽

Vol 14 (1) ◽

pp. 369

Author(s):

V. Privitera

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

Two Dimensional ◽

Spreading Resistance ◽

Metal Oxide Semiconductor Structure

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Electrical characterization of 4H-SiC metal–oxide–semiconductor structure with Al2O3 stacking layers as dielectric

Applied Physics A ◽

10.1007/s00339-017-1535-8 ◽

2018 ◽

Vol 124 (2) ◽

Author(s):

P. K. Chang ◽

J. G. Hwu

Keyword(s):

Metal Oxide ◽

Electrical Characterization ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

Metal Oxide Semiconductor Structure

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Damage effect of hafnium oxide gate dielectric based metal–oxide–semiconductor structure under gamma-ray irradiation

AIP Advances ◽

10.1063/5.0048080 ◽

2021 ◽

Vol 11 (6) ◽

pp. 065304

Author(s):

Man Ding ◽

Xin Liu

Keyword(s):

Metal Oxide ◽

Hafnium Oxide ◽

Gamma Ray ◽

Gate Dielectric ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

Damage Effect ◽

Gamma Ray Irradiation ◽

Metal Oxide Semiconductor Structure

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Determination of Fowler–Nordheim tunneling parameters in Metal–Oxide–Semiconductor structure including oxide field correction using a vertical optimization method

Solid-State Electronics ◽

10.1016/j.sse.2016.04.007 ◽

2016 ◽

Vol 122 ◽

pp. 56-63 ◽

Cited By ~ 9

Author(s):

S. Toumi ◽

Z. Ouennoughi ◽

K.C. Strenger ◽

L. Frey

Keyword(s):

Metal Oxide ◽

Optimization Method ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

Nordheim Tunneling ◽

Metal Oxide Semiconductor Structure

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Accurate measurement of extremely low surface recombination velocities on charged, oxidized silicon surfaces using a simple metal-oxide-semiconductor structure

Applied Physics Letters ◽

10.1063/1.2434172 ◽

2007 ◽

Vol 90 (4) ◽

pp. 042104 ◽

Cited By ~ 19

Author(s):

W. E. Jellett ◽

K. J. Weber

Keyword(s):

Metal Oxide ◽

Surface Recombination ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Silicon Surfaces ◽

Oxide Semiconductor ◽

Simple Metal ◽

Simple Metal Oxide ◽

Metal Oxide Semiconductor Structure

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Highly efficient diamond electromechanical transducer based on released metal–oxide–semiconductor structure

Applied Physics Letters ◽

10.1063/5.0058646 ◽

2021 ◽

Vol 119 (7) ◽

pp. 073504

Author(s):

Meiyong Liao ◽

Liwen Sang ◽

Huanying Sun ◽

Tiefu Li ◽

Satoshi Koizumi

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

Electromechanical Transducer ◽

Highly Efficient ◽

Metal Oxide Semiconductor Structure

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Interface Barrier Determination by Internal Photoemission: Applications to Metal/Oxide/Semiconductor Structure

ECS Meeting Abstracts ◽

10.1149/ma2008-01/18/713 ◽

2008 ◽

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

Internal Photoemission ◽

Interface Barrier ◽

Metal Oxide Semiconductor Structure

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P‐213: Late‐News‐Poster: Electroluminescence of Oxide Phosphor in Metal‐Oxide‐Semiconductor Structure

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.14250 ◽

2020 ◽

Vol 51 (1) ◽

pp. 1787-1789

Author(s):

Taewook Kang ◽

Jehong Park ◽

Boowon Park ◽

Jimin Lim ◽

Hyunwoo Kang ◽

...

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Oxide Semiconductor ◽

Late News ◽

Metal Oxide Semiconductor Structure

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Investigation of thermally oxidised silicon surfaces using metal-oxide-semiconductor structure

Microelectronics Reliability ◽

10.1016/0026-2714(65)90138-1 ◽

1965 ◽

Vol 4 (3) ◽

pp. 309

Keyword(s):

Metal Oxide ◽

Metal Oxide Semiconductor ◽

Semiconductor Structure ◽

Silicon Surfaces ◽

Oxide Semiconductor ◽

Metal Oxide Semiconductor Structure

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