Forbidden reflection based dark field transmission electron microscopy for the evaluation of local lattice distortion in epitaxial thin films

2008 ◽  
Vol 40 (13) ◽  
pp. 1655-1659 ◽  
Author(s):  
S. Takeno ◽  
M. Koike ◽  
H. Tanaka ◽  
T. Kinno ◽  
M. Tomita ◽  
...  
2001 ◽  
Vol 16 (8) ◽  
pp. 2336-2342 ◽  
Author(s):  
A. M. Serventi ◽  
M. A. El Khakani ◽  
R. G. Saint-Jacques ◽  
D. G. Rickerby

Highly conductive iridium dioxide (IrO2) thin films have been deposited onto in situ oxidized Si(100) substrates by means of a reactive pulsed laser deposition (PLD) process. The polycrystalline IrO2 films were obtained by ablating a metal iridium target under an optimal oxygen background pressure of 200 mtorr and at different substrate deposition temperatures (Td ) ranging from 350 to 550 °C. Conventional and high-resolution transmission electron microscopy (HRTEM) techniques were used to investigate the micro- and nanostructural changes of the PLD IrO2 films as a function of their deposition temperatures. The microstructure and the morphology of the PLD IrO2 films was found to change drastically from an irregular and loosely packed columnar structure at Td = 300 °C to a uniform and densely packed columnar structure for higher Td (≥350 °C). For IrO2 films deposited in the 350 ≤ Td ≤ 550 °C range, HRTEM have revealed the presence of highly textured arrangements of almost spherical IrO2 nanograins (of 3–5 nm diameter, regardless of Td) in the columns (of which diameter was found to increase from 85 ± 15 to 180 ± 20 nm as Td increases from 350 to 550 °C). Lattice resolution and dark-field imaging have pointed out the presence of large IrO2 crystallites made of many similarly oriented nanograins (i.e., under the same Bragg diffraction conditions). Moreover, a high continuity of the lattice planes across the entire crystallite was clearly observed. This latter aspect together with the highly textured nanostructure of the IrO2 films correlate well with their high conductivity (42 ± 6 μω cm for Td ≥ 400), which was found to be comparable with that of bulk single-crystal IrO2.


2014 ◽  
Vol 47 (1) ◽  
pp. 443-448 ◽  
Author(s):  
Yan-Ling Hu ◽  
Eric Rind ◽  
James S. Speck

In2O3is important because it has been widely used as a transparent contact material and an active gas sensor material. To understand and utilize its intrinsic physics as a semiconductor, it is necessary to have In2O3with a high material quality. In this article, single-crystalline (001)-oriented In2O3thin films were grown on yttria-stabilized zirconia (001) substrate, and a group theory analysis and transmission electron microscopy (TEM) experiments were conducted to investigate the defects within the In2O3film. Owing to the reduced symmetry of the bixbyite structure (space group Ia{\overline 3}) in comparison with the fluorite template (space group Fm {\overline 3}m), the formation of antiphase domains and 90° rotation domains in the In2O3thin films is anticipated. This prediction is confirmed experimentally by TEM and high-angle annular dark-field scanning transmission electron microscopy images. The size of the enclosed domains ranges from 50 to 300 nm, and the major domain boundaries are along the (110), (1{\overline 1}0), (010) and (100) planes. The rotation domains are related by a fourfold rotation operation along the 〈001〉 directions, which will cause the permutation of the axes of the bixbyite structure.


2001 ◽  
Vol 16 (7) ◽  
pp. 2013-2026 ◽  
Author(s):  
W. Tian ◽  
X. Q. Pan ◽  
J. H. Haeni ◽  
D. G. Schlom

Epitaxial Srn+1TinO3n+1 thin films with n = 1–5 were synthesized on (001) SrTiO3 substrates by reactive molecular beam epitaxy. The structure and microstructure of the films were investigated by x-ray diffraction, transmission electron microbeam diffraction, and high-resolution transmission electron microscopy (HRTEM) in combination with computer image simulations. Both diffraction and HRTEM studies revealed that all the films are epitaxially oriented with their c axis perpendicular to the (001) SrTiO3 plane of the substrate. Detailed investigations using quantitative HRTEM methods indicated that the films have the expected n = 1–5 structures of the Ruddlesden–Popper Srn+1TinO3n+1 homologous series. Among these films, Sr2TiO4, Sr3Ti2O7, and Sr4Ti3O10 thin films are nearly free of intergrowths, while Sr5Ti4O13 and Sr6Ti5O16 thin films contain noticeably more antiphase boundaries in their perovskite sheets and intergrowth defects. We show that these results are consistent with what is known about the thermodynamics of Srn+1TinO3n+1 phases.


1999 ◽  
Vol 14 (4) ◽  
pp. 1645-1652 ◽  
Author(s):  
Toshiki Shimizu ◽  
Masaki Tsuji ◽  
Shinzo Kohjiya

Thin films of polychloroprene (CR; Neoprene-W) were made by casting its solution (2.0 wt%) in benzene onto the water surface, and some of them were stretched by a desired amount of strain (ε) in their “molten” state. The specimens thus prepared were then crystallized and examined by transmission electron microscopy. Morphological observations in bright- and dark-field imaging modes and selected-area electron diffraction analysis revealed directly that filamentous entities observed in the bright-field image are the edge-on lamellar crystals. It was, therefore, confirmed that the morphological results obtained from the thin specimens of CR without any electron staining are basically in accord with those reported so far for the OsO4-stained thin films of CR.


1999 ◽  
Vol 14 (1) ◽  
pp. 251-258 ◽  
Author(s):  
Masaki Tsuji ◽  
Fernando A. Novillo L ◽  
Masahiro Fujita ◽  
Syozo Murakami ◽  
Shinzo Kohjiya

Thin films of poly(ethylene 2,6-naphthalate) (PEN) were isothermally crystallized at 190 °C after being melted at 300 °C. Morphological observation by transmission electron microscopy (TEM) showed the spherulitic texture in the films. Selected-area electron diffraction (SAED) indicated that the crystals in the films are the a form, as expected from our thermal condition for crystallization. The SAED pattern from the untilted specimen was characterized by the fairly intense reflection ring accompanied by other weak rings, and this intense ring was indexed as 010. A series of SAED patterns, which were obtained from the same specimen area tilted at various angles in the TEM column, suggested that the crystallites are oriented with their (001) planes being preferentially parallel to the film surface. Subsequently, a set of the dark-field images of the two-dimensional spherulite taken by using two different parts of the 010 reflection ring revealed that most of the crystallites in such a spherulite are oriented with their (010) planes being parallel in its radial direction. In addition, the spherulites in small pieces (0.05–0.08 mm thick) of PEN, which had been crystallized under the same thermal condition as above, were determined to be negatively birefringent by polarizing light microscopy.


2017 ◽  
Vol 19 (13) ◽  
pp. 9137-9142 ◽  
Author(s):  
L. López-Conesa ◽  
J. M. Rebled ◽  
D. Pesquera ◽  
N. Dix ◽  
F. Sánchez ◽  
...  

LaNiO3 (LNO) thin films of 14 nm and 35 nm thicknesses grown epitaxially on LaAlO3 (LAO) and (LaAlO3)0.3(Sr2TaAlO6)0.7 (LSAT) substrates are studied using High Resolution Transmission Electron Microscopy (HRTEM) and High Angle Annular Dark Field (HAADF) imaging.


Author(s):  
Z. L. Wang

It has been demonstrated that dark-field, atomic number sensitive images can be obtained either inscanning transmission electron microscopy (STEM) using a high-angle annular dark field detector (HAADF) or in transmission electron microscopy (TEM) using an on-axis objective aperture under the hollow cone beam illumination. The images are formed using the high-angle diffusely scattered electrons presuming that the high angle Bragg reflections are weak. Diffuse scattering can be generated by both thermal diffuse scattering (TDS) and Huang scattering, The local lattice distortion due to the presence of defects, dislocations, lattice relaxation, surfaces, or interfaces, is a source for generating diffuse scattering (or Huang scattering). In these cases, the final image contrast may not be sensitive to the local composition, thus eliminating the Zcontrast effect. The diffraction effect in the imagesformed by diffusely scattered electrons is easily seen in the TEM case. In the diffraction pattern of gold shown in Fig. 1, <110> streaks produced by TDS are clearly seen. The bright field image shows some bending and strain contrast. Most of the features observed in the bright field imageappear in the dark field image of the diffusely scattered electrons.


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