Depth profiling of light elements in PAMBE-grown GaN and helium-implanted titanium with heavy ion time-of-flight elastic recoil detection

2004 ◽  
Vol 36 (4) ◽  
pp. 317-322 ◽  
Author(s):  
A. Markwitz ◽  
V. J. Kennedy ◽  
S.M. Durbin ◽  
P. B. Johnson ◽  
A. Mücklich ◽  
...  
Keyword(s):  
Time Of Flight ◽  
Depth Profiling ◽  
Heavy Ion ◽  
Light Elements ◽  
Elastic Recoil ◽  
Elastic Recoil Detection

scholarly journals Time-Of-Flight ERDA for Depth Profiling of Light Elements

2020 ◽  
Vol 4 (4) ◽  
pp. 40
Author(s):  
Keisuke Yasuda
Keyword(s):  
Ion Beam ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Depth Resolution ◽  
Semiconductor Detectors ◽  
Light Elements ◽  
Elastic Recoil ◽  
Measurement Sensitivity ◽  
Elastic Recoil Detection ◽  
Detection Analysis

The time-of-flight elastic recoil detection analysis (TOF-ERDA) method is one of the ion beam analysis methods that is capable of analyzing light elements in a sample with excellent depth resolution. In this method, simultaneous measurements of recoil ion energy and time of flight are performed, and ion mass is evaluated. The energy of recoil ions is calculated from TOF, which gives better energy resolution than conventional Silicon semiconductor detectors (SSDs). TOF-ERDA is expected to be particularly applicable for the analysis of light elements in thin films. In this review, the principle of TOF-ERDA measurement and details of the measurement equipment along with the performance of the instrumentation, including depth resolution and measurement sensitivity, are described. Examples of TOF-ERDA analysis are presented with a focus on the results obtained from the measurement system developed by the author.

Determination of the Mass Resolution and the Depth Resolution of Time of Flight Elastic Recoil Detection Analysis Using Heavy Ion Beams

1997 ◽  
Vol 36 (Part 1, No. 9A) ◽  
pp. 5737-5740 ◽  
Author(s):  
Wan Hong ◽  
Shinjiro Hayakawa ◽  
Kuniko Maeda ◽  
Shigekazu Fukuda ◽  
Minoru Yanokura ◽  
...  
Keyword(s):  
Time Of Flight ◽  
Depth Resolution ◽  
Heavy Ion ◽  
Ion Beams ◽  
Mass Resolution ◽  
Elastic Recoil ◽  
Elastic Recoil Detection Analysis ◽  
Elastic Recoil Detection ◽  
Detection Analysis
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