Quantification from overlapping Auger peak-to-peak heights

2001 ◽  
Vol 31 (9) ◽  
pp. 856-861 ◽  
Author(s):  
J. K. O. Asante ◽  
W. D. Roos ◽  
M. F. Maritz
Keyword(s):  
1976 ◽  
Vol 58 (2) ◽  
pp. 618-620 ◽  
Author(s):  
B. Carrière ◽  
J.P. Deville ◽  
G. Maire ◽  
P. Légaré
Keyword(s):  

1986 ◽  
Vol 69 ◽  
Author(s):  
L. A. Larson

AbstractThe technique of Auger Electron Spectroscopy has been investigated for the purposes of detecting contamination levels in high dose ion implants. Historically, Auger sensitivities have been considered to be on the order of 1%. This is due to the rather large secondary electron background and the various combinations of electron beam and detector noise that may occur. In this study, it is shown that the use of background subtraction and integration of the resulting EN(E) Auger peak will result in considerably better sensitivities for the case of ion implants in silicon.


1974 ◽  
Vol 45 (2) ◽  
pp. 740-744 ◽  
Author(s):  
M.A. Chesters ◽  
B.J. Hopkins ◽  
A.R. Jones ◽  
R. Nathan

1997 ◽  
Vol 04 (06) ◽  
pp. 1273-1277 ◽  
Author(s):  
S. MRÓZ ◽  
H. OTOP ◽  
Z. JANKOWSKI

The growth and atomic structure of ultrathin Co layers deposited on the clean Cu(111) face and precovered with about 0.7 ML of Pb were investigated with the use of Auger electron spectroscopy and directional elastic peak electron spectroscopy (DEPES). Auger spectra for the clean Cu (111) face and covered with 1.5 ML of Co indicate the growth of cobalt bilayer islands sunk at one-monolayer depth in the substrate and covered with one monolayer of copper. The ratio of M2,3VV cobalt and copper Auger peak heights increases with cobalt coverage faster for the Pb -precovered Cu(111) face than for the clean surface. DEPES profiles reveal the threefold symmetry of the cobalt layer up to 4.5 ML. For higher coverages, an arrangement of a sixfold symmetry appears, indicating the presence of fcc(111) cobalt domains rotated 60° with respect to the substrate (i.e. growing after a stacking fault abcbac) separated from the abcabc domains by the bcb layer with the hcp structure.


Vacuum ◽  
1976 ◽  
Vol 26 (10-11) ◽  
pp. 437
Author(s):  
CJ Todd ◽  
R Heckingbottom ◽  
GWB Ashwell
Keyword(s):  

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