27.3: Invited Paper: Electrochemical study on wet etching of copper/molybdenum alloys in thin film transistors

2019 ◽  
Vol 50 (S1) ◽  
pp. 283-286
Author(s):  
Jong-Hyun Seo
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Wet Etching ◽  
Electrochemical Study ◽  
Molybdenum Alloys

Reactive Ion Etched MO/CR Source-Drain Metallization for Amorphous Silicon Thin Film Transistors

1991 ◽  
Vol 219 ◽  
Author(s):  
R. F. Kwasnick ◽  
G. E. Possin ◽  
R. J. Saia
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Thin Film Transistors ◽  
Hydrogenated Amorphous Silicon ◽  
Wet Etching ◽  
Silicon Thin Film ◽  
Vertical Sidewall ◽  
Etch Stop ◽  
Wet Etch ◽  
Hydrogenated Amorphous

ABSTRACTA novel two step reactive ion etch (RIE) process is described for the etching of bilayer Mo/Cr source-drain metallization on hydrogenated amorphous silicon (a-Si:H) inverted-staggered thin film transistors. The Cr acts as an etch stop during Mo etching, and is thin enough (∼3 0 nm) that only a small thickness of underlying a-Si is removed during the Cr etch. The resulting Mo/Cr profile is sloped, compared to the more vertical and somewhat uncontrolled slope that is achieved with Mo wet etch. Very similar transistor behavior was observed for both Mo wet etched and Mo/Cr reactive ion etched source-drain metallization. The major advantage of this process over wet etching of Mo source-drain is improved step coverage of subsequently deposited layers due to the less vertical sidewall slope.

scholarly journals Wet etching rates of InGaZnO for the fabrication of transparent thin-film transistors on plastic substrates

2010 ◽  
Vol 518 (14) ◽  
pp. 3992-3998 ◽  
Author(s):  
Chi-Yuan Lee ◽  
Chienliu Chang ◽  
Wen-Pin Shih ◽  
Ching-Liang Dai
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Wet Etching ◽  
Plastic Substrates

Effective performance improvement of organic thin film transistors with multi-layer modifications

2020 ◽  
Vol 91 (3) ◽  
pp. 30201
Author(s):  
Hang Yu ◽  
Jianlin Zhou ◽  
Yuanyuan Hao ◽  
Yao Ni
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Performance Enhancement ◽  
Organic Thin Film Transistors ◽  
Electrical Performance ◽  
Hole Injection ◽  
Organic Thin Film ◽  
Effective Performance ◽  
Significant Performance ◽  
P Type

Organic thin film transistors (OTFTs) based on dioctylbenzothienobenzothiophene (C8BTBT) and copper (Cu) electrodes were fabricated. For improving the electrical performance of the original devices, the different modifications were attempted to insert in three different positions including semiconductor/electrode interface, semiconductor bulk inside and semiconductor/insulator interface. In detail, 4,4′,4′′-tris[3-methylpheny(phenyl)amino] triphenylamine (m-MTDATA) was applied between C8BTBTand Cu electrodes as hole injection layer (HIL). Moreover, the fluorinated copper phthalo-cyanine (F16CuPc) was inserted in C8BTBT/SiO2 interface to form F16CuPc/C8BTBT heterojunction or C8BTBT bulk to form C8BTBT/F16CuPc/C8BTBT sandwich configuration. Our experiment shows that, the sandwich structured OTFTs have a significant performance enhancement when appropriate thickness modification is chosen, comparing with original C8BTBT devices. Then, even the low work function metal Cu was applied, a normal p-type operate-mode C8BTBT-OTFT with mobility as high as 2.56 cm2/Vs has been fabricated.

A Proposal of High Performance Organic Thin Film Transistors

2010 ◽  
Vol 130 (2) ◽  
pp. 161-166
Author(s):  
Yoshinori Ishikawa ◽  
Yasuo Wada ◽  
Toru Toyabe ◽  
Ken Tsutsui
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Organic Thin Film Transistors ◽  
Organic Thin Film

High Sensitivity pH Sensors based on Amorphous Indium-gallium-zinc Oxide Thin-film Transistors

2015 ◽  
Vol 135 (6) ◽  
pp. 192-198 ◽  
Author(s):  
Shinnosuke Iwamatsu ◽  
Yutaka Abe ◽  
Toru Yahagi ◽  
Seiya Kobayashi ◽  
Kazushige Takechi ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Thin Film Transistors ◽  
High Sensitivity ◽  
Oxide Thin Film ◽  
Indium Gallium Zinc Oxide ◽  
Ph Sensors ◽  
Zinc Oxide Thin Film ◽  
Indium Gallium

Effect of Illumination on Organic Polymer Thin-Film Transistors

2003 ◽  
Vol 771 ◽  
Author(s):  
Michael C. Hamilton ◽  
Sandrine Martin ◽  
Jerzy Kanicki
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Drain Current ◽  
Charge Carriers ◽  
Electrical Performance ◽  
Organic Polymer ◽  
Light Illumination ◽  
Polymer Thin Film ◽  
Channel Region ◽  
White Light Illumination

AbstractWe have investigated the effects of white-light illumination on the electrical performance of organic polymer thin-film transistors (OP-TFTs). The OFF-state drain current is significantly increased, while the drain current in the strong accumulation regime is relatively unaffected. At the same time, the threshold voltage is decreased and the subthreshold slope is increased, while the field-effect mobility of the charge carriers is not affected. The observed effects are explained in terms of the photogeneration of free charge carriers in the channel region due to the absorbed photons.

Photo-Induced Threshold and Onset Voltage Shifts in Organic Thin-Film Transistors

2013 ◽  
Vol E96.C (11) ◽  
pp. 1360-1366 ◽  
Author(s):  
Ichiro FUJIEDA ◽  
Tse Nga NG ◽  
Tomoya HOSHINO ◽  
Tomonori HANASAKI
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Organic Thin Film Transistors ◽  
Organic Thin Film ◽  
Onset Voltage
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