6‐3: Distinguished Paper: Alignment Control of Liquid Crystals in a 1.0‐µm‐pitch Spatial Light Modulator by Lattice‐shaped Dielectric Wall Structure

2019 ◽  
Vol 50 (1) ◽  
pp. 66-69 ◽  
Author(s):  
Yoshitomo Isomae ◽  
Takahiro Ishinabe ◽  
Yosei Shibata ◽  
Hideo Fujikake
Keyword(s):  
Liquid Crystals ◽  
Spatial Light Modulator ◽  
Wall Structure ◽  
Light Modulator ◽  
Dielectric Wall

A high-end mask writer using a spatial light modulator

2005 ◽  
Author(s):  
Ulric B. Ljungblad ◽  
Per Askebjer ◽  
Tord Karlin ◽  
Tor Sandstrom ◽  
Henrik Sjoeberg
Keyword(s):  
Spatial Light Modulator ◽  
Light Modulator
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