P-25: Super Low Temperature Doping of Phosphorus to Poly-Si Thin Films Using XeF Excimer Laser Irradiation in Phosphoric Acid Solution

2016 ◽  
Vol 47 (1) ◽  
pp. 1206-1208
Author(s):  
Akira Suwa ◽  
Hiroshi Ikenoue ◽  
Hiroaki Oizumi ◽  
Daisuke Nakamura ◽  
Tatsuo Okada
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Phosphoric Acid ◽  
Acid Solution ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Phosphoric Acid Solution ◽  
Excimer Laser Irradiation ◽  
Super Low Temperature

Phase Variation of Amorphous-Si and Poly-Si Thin Films with Excimer Laser Irradiation

1996 ◽  
Vol 35 (Part 2, No. 11B) ◽  
pp. L1473-L1475 ◽  
Author(s):  
Kuninori Kitahara ◽  
Katsuyuki Suga ◽  
Akito Hara ◽  
Kazuo Nakajima
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Phase Variation ◽  
Excimer Laser Irradiation ◽  
Amorphous Si

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation

Excimer laser irradiation of SrRuO3 epitaxial thin films

2000 ◽  
Vol 154-155 ◽  
pp. 622-626 ◽  
Author(s):  
F Benı́tez ◽  
J Roldán ◽  
V Trtı́k ◽  
C Guerrero ◽  
C Ferrater ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Epitaxial Thin Films ◽  
Excimer Laser Irradiation

Effects of cobalt thin films on the a-Si crystallisation induced by excimer laser irradiation

1999 ◽  
Vol 138-139 ◽  
pp. 145-149 ◽  
Author(s):  
P Mengucci ◽  
G Barucca ◽  
E D'Anna ◽  
M Jergel ◽  
S Luby ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Cobalt Thin Films ◽  
Excimer Laser Irradiation

Low thermal budget n-type doping into Ge(001) surface using ultraviolet laser irradiation in phosphoric acid solution

2016 ◽  
Vol 108 (5) ◽  
pp. 052104 ◽  
Author(s):  
Kouta Takahashi ◽  
Masashi Kurosawa ◽  
Hiroshi Ikenoue ◽  
Mitsuo Sakashita ◽  
Wakana Takeuchi ◽  
...  
Keyword(s):  
Phosphoric Acid ◽  
Acid Solution ◽  
Laser Irradiation ◽  
Phosphoric Acid Solution ◽  
Thermal Budget ◽  
Ultraviolet Laser ◽  
Low Thermal Budget

Crystallisation of TiO2 thin films induced by excimer laser irradiation

2007 ◽  
Vol 254 (4) ◽  
pp. 971-974 ◽  
Author(s):  
O. Van Overschelde ◽  
R. Snyders ◽  
M. Wautelet
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Tio2 Thin Films ◽  
Excimer Laser Irradiation

Crystal growth of phosphor perovskite titanate thin films under excimer laser irradiation

2008 ◽  
Vol 93 (1) ◽  
pp. 51-55 ◽  
Author(s):  
Tomohiko Nakajima ◽  
Tetsuo Tsuchiya ◽  
Toshiya Kumagai
Keyword(s):  
Thin Films ◽  
Crystal Growth ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Excimer Laser Irradiation
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