scholarly journals A method for determining the mass thickness of thin films using electron probe microanalysis

Scanning ◽  
1987 ◽  
Vol 9 (4) ◽  
pp. 145-155 ◽  
Author(s):  
H.-J. August ◽  
J. Wernisch
Keyword(s):  
Thin Films ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Mass Thickness

scholarly journals Determining the Nitrogen Content in (Oxy)Nitride Materials

Materials ◽  
2018 ◽  
Vol 11 (8) ◽  
pp. 1331 ◽  
Author(s):  
Franck Tessier
Keyword(s):  
Thin Films ◽  
Nitrogen Content ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Extraction Techniques ◽  
Bulk Materials ◽  
Wavelength Dispersive Spectroscopy ◽  
Oxygen Determination ◽  
Carrier Gas Hot Extraction ◽  
Large Panel

Nitrogen (and also oxygen) determination has become an important parameter to characterize (oxy)nitride materials for many properties and applications. Analyzing such anions with accuracy is still a challenge for some materials. However, to date, a large panel of methodologies is available to answer this issue with relevant results, even for thin films. Carrier gas hot extraction techniques and electron probe microanalysis with wavelength dispersive spectroscopy (EPMA-WDS) look attractive to analyze bulk materials and thin films, respectively. This paper gathers several techniques using chemical and physical routes to access such anionic contents. Limitations and problems are pointed out for both powders and films.

Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM

2009 ◽  
Vol 16 (1) ◽  
pp. 21-32 ◽  
Author(s):  
Xavier Llovet ◽  
Claude Merlet
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Computer Program ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Emission Model ◽  
X Ray

AbstractXFILM is a computer program for determining the thickness and composition of thin films on substrates and multilayers by electron probe microanalysis. In this study, we describe the X-ray emission model implemented in the latest version of XFILM and assess its reliability by comparing measured and calculated k-ratios from thin-film samples available in the literature. We present and discuss examples of applications of XFILM that illustrate the capabilities of the program.

scholarly journals Electron Probe Microanalysis of Thin Films and Multilayers Using the X-FILM Computer Code

2009 ◽  
Vol 15 (S2) ◽  
pp. 516-517
Author(s):  
X Llovet ◽  
C Merlet
Keyword(s):  
Thin Films ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Computer Code

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

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