Model‐based process capability indices: The dry‐etching semiconductor case study

2020 ◽  
Vol 36 (7) ◽  
pp. 2309-2321
Author(s):  
Riccardo Borgoni ◽  
Diego Zappa
Processes ◽  
2019 ◽  
Vol 7 (11) ◽  
pp. 833 ◽  
Author(s):  
Alatefi ◽  
Ahmad ◽  
Alkahtani

Process capability indices (PCIs) have always been used to improve the quality of products and services. Traditional PCIs are based on the assumption that the data obtained from the quality characteristic (QC) under consideration are normally distributed. However, most data on manufacturing processes violate this assumption. Furthermore, the products and services of the manufacturing industry usually have more than one QC; these QCs are functionally correlated and, thus, should be evaluated together to evaluate the overall quality of a product. This study investigates and extends the existing multivariate non-normal PCIs. First, a multivariate non-normal PCI model from the literature is modeled and validated. An algorithm to generate non-normal multivariate data with the desired correlations is also modeled. Then, this model is extended using two different approaches that depend on the well-known Box–Cox and Johnson transformations. The skewness reduction is further improved by applying heuristics algorithms. These two approaches outperform the investigated model from the literature because they can provide more precise results regardless of the skewness type. The comparison is made based on the generated data and a case study from the literature.


2015 ◽  
Vol 33 (1) ◽  
pp. 42-61 ◽  
Author(s):  
Jeh-Nan Pan ◽  
Chung-I Li ◽  
Wei-Chen Shih

Purpose – In the past few years, several capability indices have been developed for evaluating the performance of multivariate manufacturing processes under the normality assumption. However, this assumption may not be true in most practical situations. Thus, the purpose of this paper is to develop new capability indices for evaluating the performance of multivariate processes subject to non-normal distributions. Design/methodology/approach – In this paper, the authors propose three non-normal multivariate process capability indices (MPCIs) RNMC p , RNMC pm and RNMC pu by relieving the normality assumption. Using the two normal MPCIs proposed by Pan and Lee, a weighted standard deviation method (WSD) is used to modify the NMC p and NMC pm indices for the-nominal-the-best case. Then the WSD method is applied to modify the multivariate ND index established by Niverthi and Dey for the-smaller-the-better case. Findings – A simulation study compares the performance of the various multivariate indices. Simulation results show that the actual non-conforming rates can be correctly reflected by the proposed capability indices. The numerical example further demonstrates that the actual quality performance of a non-normal multivariate process can properly reflected by the proposed capability indices. Practical implications – Process capability index is an important SPC tool for measuring the process performance. If the non-normal process data are mistreated as a normal one, it will result in an improper decision and thereby lead to an unnecessary quality loss. The new indices can provide practicing managers and engineers with a better decision-making tool for correctly measuring the performance for any multivariate process or environmental system. Originality/value – Once the existing multivariate quality/environmental problems and their Key Performance Indicators are identified, one may apply the new capability indices to evaluate the performance of various multivariate processes subject to non-normal distributions.


2002 ◽  
Vol 27 (1) ◽  
pp. 55-68
Author(s):  
Satish Y Deodhar ◽  
Devanath Tirupati

Indian Food Specialties Limited (IFS) introduced tools of food quality management in May 2000 in response to changing market conditions and poor profitability. Spoilage in the production process was very high and the company had incurred losses for three successive years starting from 1996-97. The company addressed quality concerns by introducing management tools such as quality control charts and process capability indices, and was considering implementation of a food safety system called Hazard Analysis and Critical Control Points (HACCP). The case describes the changing market conditions and the company's response to improving quality, and provides a learning exercise on quality control charts, process capability indices, and HACCP.


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