Reduction of contact resistance in V-based electrode for high AlN molar fraction n-type AlGaN by using thin SiN
x
intermediate layer
2016 ◽
Vol 55
(5S)
◽
pp. 05FL03
◽
1987 ◽
Vol 45
◽
pp. 326-327
1989 ◽
Vol 47
◽
pp. 172-173
Keyword(s):
2001 ◽
Vol 25
(4−2)
◽
pp. 767-770
◽
Keyword(s):
2012 ◽
Vol E95.C
(9)
◽
pp. 1531-1534
◽
2014 ◽
Vol E97.C
(9)
◽
pp. 873-879
◽