Using MDECR-PECVD to study the impact of ion bombardment energy on microstructural properties of μc-Si:H thin film grown from an SiF4
/H2
chemistry
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2012 ◽
Vol 358
(17)
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pp. 1974-1977
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2003 ◽
Vol 58
(2)
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pp. 149-155
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2000 ◽
Vol 170
(3-4)
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pp. 375-384
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