Processing-induced near-interfacial thermal donor generation in (100)Si/Si-oxycarbide insulator structures revealed by electron spin resonance

2014 ◽  
Vol 11 (11-12) ◽  
pp. 1574-1577
Author(s):  
S. Iacovo ◽  
A. Stesmans ◽  
S. Nguyen ◽  
V. V. Afanas'ev
Keyword(s):  
Electron Spin Resonance ◽  
Electron Spin ◽  
Thermal Donor ◽  
Spin Resonance

Electron spin resonance of palladium-related defect in silicon

2009 ◽  
Vol 404 (23-24) ◽  
pp. 4586-4589
Author(s):  
T. Ishiyama ◽  
S. Kimura ◽  
Y. Kamiura ◽  
Y. Yamashita
Keyword(s):  
Electron Spin Resonance ◽  
Electron Spin ◽  
Spin Resonance ◽  
Related Defect
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