Spectroscopic ellipsometry and optical transmission study of LiPON thin films prepared by RF sputtering

2016 ◽  
Vol 254 (4) ◽  
pp. 1600424 ◽  
Author(s):  
Yurong Su ◽  
Jia Zhang ◽  
Sviatoslav Shokhovets ◽  
Angelika Polity ◽  
Bruno K. Meyer
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Transmission ◽  
Rf Sputtering ◽  
Transmission Study

Spectroscopic Ellipsometry Study on Strain Evolution of Transparent Conductive Thin Films Prepared by RF Sputtering Method

2015 ◽  
Vol 1110 ◽  
pp. 222-225 ◽  
Author(s):  
Keh Moh Lin ◽  
Yang Hsien Lee ◽  
Wen Yeong Huang ◽  
Ching Tsun Hsieh ◽  
Chih Kai Hsu
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Stress Analysis ◽  
Spectroscopic Ellipsometry ◽  
Strain Relaxation ◽  
Rf Sputtering ◽  
The State ◽  
Strain Evolution ◽  
Conductive Thin Films ◽  
Deposited Films

In this study, AZO films were deposited by RF sputtering technique. Then, the state of residual stress in the AZO films was investigated by using spectroscopic ellipsometry (SE) and XRD methods. Our experiments show that a suitable SE model could provide useful indication about the variation of stress in the as-deposited films. However, there is a disparity in the results of the SE fitting and XRD stress analysis for annealed AZO films. Further investigation is required in order to understand the cause of this contradiction. Despite this disparity, the SE technique enables us to monitor strain relaxation in TCO films with a faster and simpler way compared with other methods.

Narrow optical gap ferroelectric Bi2ZnTiO6 thin films deposited by RF sputtering

2019 ◽  
Vol 7 (17) ◽  
pp. 10696-10701 ◽  
Author(s):  
Fábio G. Figueiras ◽  
J. Ramiro A. Fernandes ◽  
J. P. B. Silva ◽  
Denis O. Alikin ◽  
Eugénia C. Queirós ◽  
...  
Keyword(s):  
Thin Films ◽  
Rf Sputtering ◽  
Optical Gap ◽  
Ferroelectric Oxide

Thriving ferroelectric oxide Bi2ZnTiO6 thin films with a 1.48 eV optical gap.

scholarly journals High quality ITO thin films grown by dc and RF sputtering without oxygen

2010 ◽  
Vol 43 (5) ◽  
pp. 055402 ◽  
Author(s):  
Ocal Tuna ◽  
Yusuf Selamet ◽  
Gulnur Aygun ◽  
Lutfi Ozyuzer
Keyword(s):  
Thin Films ◽  
Rf Sputtering ◽  
High Quality ◽  
Ito Thin Films

Strong optical anisotropies of F16CuPc thin films studied by spectroscopic ellipsometry

2003 ◽  
Vol 119 (12) ◽  
pp. 6335-6340 ◽  
Author(s):  
M. I. Alonso ◽  
M. Garriga ◽  
J. O. Ossó ◽  
F. Schreiber ◽  
E. Barrena ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry

Characteristics of CIGS thin films prepared by RF sputtering employing CIGS single target

2011 ◽  
Author(s):  
Tae-Won Kim ◽  
Young-Baek Kim ◽  
Sang-In Song ◽  
Chae-Whan Jung ◽  
Jong-Ho Lee
Keyword(s):  
Thin Films ◽  
Rf Sputtering ◽  
Single Target

Characterization of Cu(InxGa1−x)2Se3.5 thin films prepared by rf sputtering

1998 ◽  
Vol 50 (1-4) ◽  
pp. 13-18 ◽  
Author(s):  
Tooru Tanaka ◽  
Nobutaka Tanahashi ◽  
Toshiyuki Yamaguchi ◽  
Akira Yoshida
Keyword(s):  
Thin Films ◽  
Rf Sputtering

scholarly journals Optimizing the Properties of La0.8Sr0.2CrO3 Thin Films through Post-Annealing for High-Temperature Sensing

Nanomaterials ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 1802
Author(s):  
Dan Liu ◽  
Peng Shi ◽  
Yantao Liu ◽  
Yijun Zhang ◽  
Bian Tian ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Annealing Temperature ◽  
Rf Sputtering ◽  
Maximum Size ◽  
Cross Sectional ◽  
Post Annealing ◽  
Maximum Conductivity ◽  
Different Temperatures ◽  
Post Annealing Temperature

La0.8Sr0.2CrO3 (0.2LSCO) thin films were prepared via the RF sputtering method to fabricate thin-film thermocouples (TFTCs), and post-annealing processes were employed to optimize their properties to sense high temperatures. The XRD patterns of the 0.2LSCO thin films showed a pure phase, and their crystallinities increased with the post-annealing temperature from 800 °C to 1000 °C, while some impurity phases of Cr2O3 and SrCr2O7 were observed above 1000 °C. The surface images indicated that the grain size increased first and then decreased, and the maximum size was 0.71 μm at 1100 °C. The cross-sectional images showed that the thickness of the 0.2LSCO thin films decreased significantly above 1000 °C, which was mainly due to the evaporation of Sr2+ and Cr3+. At the same time, the maximum conductivity was achieved for the film annealed at 1000 °C, which was 6.25 × 10−2 S/cm. When the thin films post-annealed at different temperatures were coupled with Pt reference electrodes to form TFTCs, the trend of output voltage to first increase and then decrease was observed, and the maximum average Seebeck coefficient of 167.8 µV/°C was obtained for the 0.2LSCO thin film post-annealed at 1100 °C. Through post-annealing optimization, the best post-annealing temperature was 1000 °C, which made the 0.2LSCO thin film more stable to monitor the temperatures of turbine engines for a long period of time.

scholarly journals Fully automated spectroscopic ellipsometry analyses: Application to MoOx thin films

2021 ◽  
Vol 129 (24) ◽  
pp. 243102
Author(s):  
Kohei Oiwake ◽  
Yukinori Nishigaki ◽  
Shohei Fujimoto ◽  
Sara Maeda ◽  
Hiroyuki Fujiwara
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry
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