The Determination of Arsenic Atom Concentration in Arsenic-Doped Silicon by Using HOLZ Analysis

1996 ◽  
Vol 154 (2) ◽  
pp. 531-541 ◽  
Author(s):  
N. Hashikawa ◽  
K. Watanabe ◽  
Y. Kikuchi ◽  
Y. Oshima ◽  
I. Hashimoto
Author(s):  
Y. Kikuchi ◽  
N. Hashikawa ◽  
F. Uesugi ◽  
E. Wakai ◽  
K. Watanabe ◽  
...  

In order to measure the concentration of arsenic atoms in nanometer regions of arsenic doped silicon, the HOLZ analysis is carried out underthe exact [011] zone axis observation. In previous papers, it is revealed that the position of two bright lines in the outer SOLZ structures on the[011] zone axis is little influenced by the crystal thickness and the background intensity caused by inelastic scattering electrons, but is sensitive to the concentration of As atoms substitutbnal for Siatomic site.As the result, it becomes possible to determine the concentration of electrically activated As atoms in silicon within an observed area by means of the simple fitting between experimental result and dynamical simulatioan. In the present work, in order to investigate the distribution of electrically activated As in silicon, the outer HOLZ analysis is applied using a nanometer sized probe of TEM equipped with a FEG.Czodiralsld-gown<100>orientated p-type Si wafers with a resistivity of 10 Ώ cm are used for the experiments.TheAs+ implantation is performed at a dose of 5.0X1015cm-2at 25keV.


Tellus B ◽  
1997 ◽  
Vol 49 (5) ◽  
pp. 592-601 ◽  
Author(s):  
J. RUDOLPH ◽  
B. RAMACHER ◽  
C. PLASS-DULMER ◽  
K.-P. MULLER ◽  
R. KOPPMANN

2020 ◽  
Vol 110 ◽  
pp. 110461
Author(s):  
Xiaoshuo Zhang ◽  
Chunhua Li ◽  
Sheliang Zhao ◽  
Huiyun Pang ◽  
Yong Han ◽  
...  

2002 ◽  
Vol 16 (31) ◽  
pp. 4775-4781 ◽  
Author(s):  
N. HADJI

Two analytical techniques for the determination (within the limits of validity of the free electron model) of the absolute atom concentration (AAC) are reported in details. One of these may be useful for the determination of a AAC for chemical elements (e.g. hydrogen) which are not easy to detect. EELS is used.


2016 ◽  
Vol 18 (8) ◽  
pp. 6291-6300 ◽  
Author(s):  
Xiaojun Li ◽  
Pieterjan Claes ◽  
Marko Haertelt ◽  
Peter Lievens ◽  
Ewald Janssens ◽  
...  

The structures of niobium doped silicon cluster cations are determined by a combination of infrared multiple photon dissociation spectroscopy and density functional theory calculations.


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