On the Role of a Defect Flux on the Redistribution of Silver Atoms in Silver–Nickel Multilayer Films under Ion Bombardment

1992 ◽  
Vol 133 (1) ◽  
pp. 25-31
Author(s):  
S. Cretti ◽  
D. C. Kothari ◽  
A. Miotello
Polymer ◽  
2012 ◽  
Vol 53 (23) ◽  
pp. 5336-5346 ◽  
Author(s):  
N. Sallem-Idrissi ◽  
V. Miri ◽  
A. Marin ◽  
R. Seguela ◽  
J.-M. Lefebvre ◽  
...  

2019 ◽  
Vol 32 (5) ◽  
pp. 247-257 ◽  
Author(s):  
Saleh Al‐Ghamdi ◽  
Barbara Rasco ◽  
Juming Tang ◽  
Gustavo V. Barbosa‐Cánovas ◽  
Shyam S. Sablani

1986 ◽  
Vol 74 ◽  
Author(s):  
J. E. Greene ◽  
A. Rockett ◽  
J.-E. Sundgren

AbstractLow-energy (often < 100 eV) ion bombardment during thin film deposition is commonly used in such diverse application areas as microelectronics, optical coatings. magnetic recording layers. and hard wear resistant coatings to modify the microstructure and microchemistry of films deposited by a variety of techniques (e.g. sputtering, primary ion deposition, plasma-assisted CVD, and accelerated-beam MBE). Ion irradiation has been shown to affect every phase of deposition including nucleation and growth kinetics, crystal structure and phase stability, the average grain size and degree of preferred orientation of polycrystalline films, the epitaxial temperature of single-crystal films, defect concentrations, elemental incorporation probabilities, surface segregation, and, hence, film properties. As discussed in this brief review, a detailed understanding of many of these processes is beginning to emerge. Effects such as trapping, preferential sputtering, enhanced diffusion, and collisional mixing have been used to interpret and, in some cases, model experimental results. Nevertheless, there are still large gaps in our knowledge of the role of ion bombardment on fundamental processes such as nucleation kinetics.


1987 ◽  
Vol 61 (11) ◽  
pp. 5000-5011 ◽  
Author(s):  
C. F. A. van Os ◽  
E. H. A. Granneman ◽  
P. W. van Amersfoort

Langmuir ◽  
2004 ◽  
Vol 20 (11) ◽  
pp. 4540-4547 ◽  
Author(s):  
Donald T. Haynie ◽  
Shantanu Balkundi ◽  
Naveen Palath ◽  
Kiran Chakravarthula ◽  
Komal Dave

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